Invention Grant
- Patent Title: Transition metal dichalcogenide nanowires and methods of fabrication
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Application No.: US16914137Application Date: 2020-06-26
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Publication No.: US12176388B2Publication Date: 2024-12-24
- Inventor: Kevin O'Brien , Chelsey Dorow , Kirby Maxey , Carl Naylor , Shriram Shivaraman , Sudarat Lee , Tanay Gosavi , Chia-Ching Lin , Uygar Avci , Ashish Verma Penumatcha
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L21/02 ; H01L27/092 ; H01L29/06 ; H01L29/20 ; H01L29/267

Abstract:
A transistor structure includes a first channel layer over a second channel layer, where the first and the second channel layers include a monocrystalline transition metal dichalcogenide (TMD). The transistor structure further includes a source material coupled to a first end of the first and second channel layers, a drain material coupled to a second end of the first and second channel layers, a gate electrode between the source material and the drain material, and between the first channel layer and the second channel layer and a gate dielectric between the gate electrode and each of the first channel layer and the second channel layer.
Public/Granted literature
- US20210408227A1 TRANSITION METAL DICHALCOGENIDE NANOWIRES AND METHODS OF FABRICATION Public/Granted day:2021-12-30
Information query
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