Invention Grant
- Patent Title: Laser interferometer
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Application No.: US18325729Application Date: 2023-05-30
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Publication No.: US12181277B2Publication Date: 2024-12-31
- Inventor: Kohei Yamada , Takeshi Shimizu
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2020-142497 20200826
- Main IPC: G01B9/02002
- IPC: G01B9/02002 ; G01B9/02 ; G02B5/04

Abstract:
A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and an oscillation circuit that outputs the reference signal to the demodulation circuit, and the vibrator is a signal source of the oscillation circuit.
Public/Granted literature
- US20230314121A1 Laser Interferometer Public/Granted day:2023-10-05
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