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公开(公告)号：US20240230311A1
公开(公告)日：2024-07-11
申请号：US18410934
申请日：2024-01-11
申请人： OPTIPRO SYSTEMS, LLC
IPC分类号： G01B9/02015 , G01B9/02 , G01B9/02002 , G01B11/02
CPC分类号： G01B9/02015 , G01B9/02002 , G01B9/02034 , G01B11/02
摘要： An interferometer system for measuring the displacement of a location of a test surface includes a reflective beamsplitter having a through-hole through which light enters into and exits from a reference arm and having a second through-hole through which a portion of light from the measurement arm of the interferometer passes through the beamsplitter and is incident on a position sensing device (PSD). The output of the PSD is then used as an indicator of the amount and direction of tilt of the surface under test so that systemic errors of the interferometer induced by the tilt of the test surface can be determined and removed from the displacement measurement.
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公开(公告)号：US20230314121A1
公开(公告)日：2023-10-05
申请号：US18325729
申请日：2023-05-30
发明人： Kohei YAMADA , Takeshi SHIMIZU
IPC分类号： G01B9/02002 , G01B9/02
CPC分类号： G01B9/02002 , G01B9/02083 , G02B5/04
摘要： A laser interferometer includes alight source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and an oscillation circuit that outputs the reference signal to the demodulation circuit, and the vibrator is a signal source of the oscillation circuit.
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公开(公告)号：US11525737B2
公开(公告)日：2022-12-13
申请号：US16965753
申请日：2019-01-15
发明人： Maarten Jozef Jansen
IPC分类号： G01B9/02002 , G01J9/02 , G01B11/00 , G03F7/00 , G03F7/20 , G01B9/02001 , G01B9/02015
摘要： The invention provides a wavelength tracking system comprising a wavelength tracking unit and an interferometer system. The wavelength tracking unit has reflection surfaces at stabile positions providing a first reflection path with a first path length and a second reflection path with a second path length. The first path length is substantially larger than the second path length. The interferometer system comprises: a beam splitter to split a light beam in a first measurement beam and a second measurement beam; at least one optic element to guide the first measurement beam, at least partially, along the first reflection path and the second measurement beam, at least partially, along the second reflection path; a first light sensor arranged at an end of the first reflection path to receive the first measurement beam and to provide a first sensor signal on the basis of the first measurement beam; a second light sensor arranged at an end of the second reflection path to receive the second measurement beam and to provide a second sensor signal on the basis of the second measurement beam; and a processing unit to determine a wavelength or change in wavelength on the basis of the first sensor signal and the second sensor signal.
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公开(公告)号：US20240175674A1
公开(公告)日：2024-05-30
申请号：US18522316
申请日：2023-11-29
发明人： Kohei YAMADA , Atsushi MATSUO
IPC分类号： G01B9/02 , G01B9/02002
CPC分类号： G01B9/02083 , G01B9/02002 , G01B9/02045 , G01B2290/70
摘要： A laser interferometer includes: a laser light source configured to emit laser light toward an object; an optical modulator including a vibrator configured to modulate the laser light using the vibrator and superimpose a modulation signal on the laser light; a photodetector configured to receive the laser light including a sample signal derived from the object and the modulation signal, and to output a light reception signal; a demodulation circuit configured to demodulate the sample signal from the light reception signal based on a reference signal; and an oscillation circuit configured to operate using the vibrator as a signal source and output the reference signal to the demodulation circuit. The vibrator includes a vibration substrate having a base portion and a vibration unit coupled to the base portion. The vibration unit vibrates along an in-plane direction of the vibration substrate and includes a side surface intersecting with the in-plane direction.
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公开(公告)号：US11719529B2
公开(公告)日：2023-08-08
申请号：US17613124
申请日：2020-05-11
IPC分类号： G01B9/02002 , G01B9/02055 , G01J9/02 , G03F7/20 , G03F7/00
CPC分类号： G01B9/02002 , G01B9/0207 , G01J9/02 , G03F7/70775 , G01B2290/60
摘要： An interferometer system including: an optical system arranged to split a radiation beam from a laser source into a first beam along a first optical path and a second beam along a second optical path, and recombine the first beam and the second beam to a recombined beam, a detector to receive the recombined beam and to provide a detector signal based on the received recombined beam, and a processing unit, wherein a first optical path length of the first optical path and a second optical path length of the second optical path have an optical path length difference, and wherein the processing unit is arranged to determine a mode hop of the laser source on the basis of a phase shift in the detector signal.
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公开(公告)号：US20230085489A1
公开(公告)日：2023-03-16
申请号：US17898646
申请日：2022-08-30
发明人： Kohei YAMADA
IPC分类号： G01B9/02015 , G02B27/28 , G01B9/02002 , G02B26/08 , G02B27/30
摘要： A laser interferometer includes: a laser light source; a collimator configured to generate collimated light; an optical modulator configured to modulate the collimated light into reference light having a different frequency; and a light receiving element configured to receive object light and the reference light and output a light receiving signal, in which when an optical axis of the collimated light is a first optical axis, when return light is generated, an optical axis of the return light is a second optical axis, a position at which the collimated light is generated is a reference position, the following equation (A) is satisfied: K 2 + 1 2 ( R + 2 L R λ ) ≦ Δ y ( A ) in which Δy is a shift width between the first optical axis and the second optical axis at the reference position, κ is an effective diameter of the collimator, R is a light diameter of the collimated light, L is a distance between the reference position and the optical modulator, and Λ is a wavelength of the collimated light.
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公开(公告)号：US11598627B2
公开(公告)日：2023-03-07
申请号：US16075174
申请日：2017-02-03
发明人： Yizheng Zhu
IPC分类号： G01B9/02001 , G01B9/02004 , G01B9/02002 , G01B9/04 , G02B27/52 , G01B9/02098
摘要： Various methods, systems and apparatus are provided for imaging and sensing using interferometry. In one example, a system includes an interferometer; a light source that can provide light to the interferometer at multiple wavelengths (λi); and optical path delay (OPD) modifying optics that can enhance contrast in an interferometer output associated with a sample. The light can be directed to the sample by optics of the interferometer. The interferometer output can be captured by a detector (e.g., a camera) at each of the multiple wavelengths (λi). In another example, an apparatus includes an add-on unit containing OPD that can enhance contrast in an interferometer output associated with a sample illuminated by light at a defined wavelength (λi). A detector can be attached to the add-on unit to record the interferometer output at the defined wavelength (λi).
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公开(公告)号：US11454493B2
公开(公告)日：2022-09-27
申请号：US17163545
申请日：2021-01-31
发明人： Nils Haverkamp
IPC分类号： G01B11/00 , G01B9/02002 , G01B11/27
摘要： A position of a movable object is determined with a capture structure having a profile of an optical property that varies along a surface of the capture structure such that the profile corresponds to a progression of numerical values with local maxima and local minima on an ordered scale of the numerical values, and which is interpretable as a first mathematical function of the location. The optical property varies such that a second mathematical function of the location has an absolute maximum corresponding to a maximum value of the optical property. The optical property has assigned corresponding numerical values such that the progression thereof has the local maxima and the local minima and corresponds to the first mathematical function of the location. The position of the movable object is determined by a frequency analysis of the progression of the numerical values of the second mathematical function of the location.
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9.发明公开公开(公告)号：US20240361120A1
公开(公告)日：2024-10-31
申请号：US18687468
申请日：2022-07-04
发明人： Naoaki KATO , Yuu TAKIGUCHI , Hiroshi TANAKA
IPC分类号： G01B11/24 , G01B9/02002 , G01B11/30
CPC分类号： G01B11/2441 , G01B9/02002 , G01B11/30
摘要： An optical heterodyne interference measurement apparatus includes a beam generation unit, a beam splitter, a mirror, a first photodetector, a linear polarizer, a second photodetector, a linear polarizer, an AD conversion unit, and a computer. The beam generation unit generates and outputs a first light beam and a second light beam having polarizations orthogonal to each other. The first light beam and the second light beam have optical frequencies different from each other by a heterodyne frequency. The computer sets, when ωp is set to any peak frequency being temporally constant in a frequency spectrum of intensity noise included in the first light beam or the second light beam output from the beam generation unit, the heterodyne frequency ωh to a value of a rational multiple of the peak frequency ωp.
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公开(公告)号：US11906301B2
公开(公告)日：2024-02-20
申请号：US17469119
申请日：2021-09-08
发明人： Ryo Hasebe
IPC分类号： G01B9/02 , G01B9/02055 , G01B9/02002 , G01B9/02001
CPC分类号： G01B9/02063 , G01B9/02002 , G01B9/02012 , G01B9/02071 , G01B9/02072 , G01B9/02092
摘要： A thickness evaluation method of the cell sheet according to the invention includes tomographically imaging a cell sheet by optical coherence tomography and obtaining a thickness distribution of the cell sheet based on a result of the tomography imaging. A tomographic image corresponding to one cross section of the cell sheet is obtained by tomography imaging while scanning the light in a main scanning direction. The tomography imaging is performed in every time while moving an incident position of the light at a predetermined feed pitch in a sub-scanning direction, thereby a plurality of the tomographic images corresponding to a plurality of cross-sections are obtained. One-dimensional thickness distributions of the cell sheet in the corresponding cross-sections are obtained based on each of the plurality of tomographic images, and a two-dimensional thickness distribution of the cell sheet is obtained by interpolating the one-dimensional thickness distributions.
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