Invention Grant
- Patent Title: Method for manufacturing a semiconductor storage device including a division film
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Application No.: US17412933Application Date: 2021-08-26
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Publication No.: US12185539B2Publication Date: 2024-12-31
- Inventor: Kazuharu Yamabe , Yoshiro Shimojo
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP2021-036506 20210308
- Main IPC: H10B43/27
- IPC: H10B43/27

Abstract:
In a method for manufacturing a memory, a first stacked body is formed by stacking a first insulating film and a first sacrificial film. A first columnar body including a first semiconductor portion extending in the first stacked body in the first direction and a charge trapping film provided on an outer peripheral surface of the first semiconductor portion is formed. A second columnar body provided in a second direction of the first columnar body and including a second semiconductor portion stretching in the first stacked body in the first direction and a charge trapping film on an outer peripheral surface of the second semiconductor portion is formed. A second insulating film is formed above the first stacked body. A third columnar body including a third semiconductor portion provided on both the first columnar body and the second columnar body and stretching in the second insulating film in the first direction and a first gate insulating film provided on an outer peripheral surface of the third semiconductor portion is formed. A first division insulating film extending in the first direction and a third direction intersecting the first direction and the second direction and dividing the third semiconductor portion of the third columnar body in the second direction is formed.
Public/Granted literature
- US20220285391A1 SEMICONDUCTOR STORAGE DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2022-09-08
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