Invention Grant
- Patent Title: Material deposition apparatus, method of depositing material on a substrate, and material deposition system
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Application No.: US17717642Application Date: 2022-04-11
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Publication No.: US12203164B2Publication Date: 2025-01-21
- Inventor: Tamara Heintz , Stefan Bangert , Suresh Manikkoth Kollarath , Ramgopal Chakkaravarthy Ramasamy
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: C23C14/56
- IPC: C23C14/56 ; C23C14/24 ; C23C14/54

Abstract:
A material deposition apparatus for depositing an evaporated material onto a substrate is provided. The material deposition apparatus includes a processing drum having a cooler configured to control a substrate temperature during processing of a substrate on the processing drum; a roller guiding the substrate towards the processing drum; a first heater assembly positioned to heat the substrate in a free-span area between the roller and the processing drum; a second heater assembly positioned to heat the substrate while being supported on the processing drum; at least one deposition source provided along a substrate transport path downstream of the second heater assembly; a substrate speed sensor providing a speed signal correlating with a substrate transportation speed; and a controller having an input for the speed signal configured to control at least the first heater assembly.
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Information query
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