Invention Grant
- Patent Title: Fins for metal oxide semiconductor device structures
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Application No.: US17187284Application Date: 2021-02-26
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Publication No.: US12205955B2Publication Date: 2025-01-21
- Inventor: Martin D. Giles , Tahir Ghani
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/02 ; H01L21/8238 ; H01L21/84 ; H01L27/092 ; H01L27/12 ; H01L29/165 ; H01L29/66 ; H01L29/78

Abstract:
Methods are disclosed for forming fins in transistors. In one embodiment, a method of fabricating a device includes forming silicon fins on a substrate and forming a dielectric layer on the substrate and adjacent to the silicon fins such that an upper region of each silicon fin is exposed. Germanium may then be epitaxially grown germanium on the upper regions of the silicon fins to form germanium fins.
Public/Granted literature
- US20210210514A1 FINS FOR METAL OXIDE SEMICONDUCTOR DEVICE STRUCTURES Public/Granted day:2021-07-08
Information query
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