Invention Grant
- Patent Title: Magnetic shielding for plasma sources
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Application No.: US17506538Application Date: 2021-10-20
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Publication No.: US12237155B2Publication Date: 2025-02-25
- Inventor: Hema Swaroop Mopidevi , Neil Martin Paul Benjamin , John Pease , Thomas Anderson
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01F27/36 ; H01L21/683
Abstract:
In some examples, a magnetic shield for a plasma source is provided. An example magnetic shield comprises a back-shell. The back-shell includes a cage defined, at least in part, by an arrangement of bars of ferro-magnetic material. The cage is sized and configured to at least extend over a top side of an RF source coil for the plasma source.
Information query
