Invention Grant
- Patent Title: Heater assembly including cooling apparatus and method of using same
-
Application No.: US16983364Application Date: 2020-08-03
-
Publication No.: US12247286B2Publication Date: 2025-03-11
- Inventor: Carl Louis White , Eric James Shero , Kyle Fondurulia , Timothy James Sullivan
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: F28F7/00
- IPC: F28F7/00 ; C23C16/455 ; C23C16/52
Abstract:
A cooling apparatus and methods for maintaining a precursor source vessel heater at a desired temperature are disclosed. The apparatus and methods can be used to maintain a desired temperature gradient within the precursor source vessel for improved integrity of the precursor source before delivery of the precursor to a reaction chamber. The apparatus and methods can also be used for rapid cooling of a source vessel for maintenance.
Public/Granted literature
- US20210040613A1 HEATER ASSEMBLY INCLUDING COOLING APPARATUS AND METHOD OF USING SAME Public/Granted day:2021-02-11
Information query
