Invention Grant
- Patent Title: Image sensor with varying depth deep trench isolation structure for reduced crosstalk
-
Application No.: US17463222Application Date: 2021-08-31
-
Publication No.: US12262562B2Publication Date: 2025-03-25
- Inventor: Seong Yeol Mun
- Applicant: OMNIVISION TECHNOLOGIES, INC.
- Applicant Address: US CA Santa Clara
- Assignee: OMNIVISION TECHNOLOGIES, INC.
- Current Assignee: OMNIVISION TECHNOLOGIES, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: H10F39/18
- IPC: H10F39/18 ; H10F39/00 ; H10F39/12

Abstract:
An image sensor comprises a first photodiode, a second photodiode, and a deep trench isolation structure. The first photodiode and the second photodiode are each disposed within a semiconductor substrate. The first photodiode is adjacent to the second photodiode. The deep trench isolation structure has a varying depth disposed within the semiconductor substrate between the first photodiode and the second photodiode. The DTI structure extends the varying depth from a first side of the semiconductor substrate towards a second side of the semiconductor substrate. The first side of the semiconductor substrate is opposite of the second side of the semiconductor substrate.
Public/Granted literature
- US20230067975A1 IMAGE SENSOR WITH VARYING DEPTH DEEP TRENCH ISOLATION STRUCTURE FOR REDUCED CROSSTALK Public/Granted day:2023-03-02
Information query