- Patent Title: Deep learning image denoising for semiconductor-based applications
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Application No.: US17721300Application Date: 2022-04-14
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Publication No.: US12299848B2Publication Date: 2025-05-13
- Inventor: Aditya Gulati , Raghavan Konuru , Niveditha Lakshmi Narasimhan , Saravanan Paramasivam , Martin Plihal , Prasanti Uppaluri
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Entropy Matters LLC
- Priority: IN202141024096 20210531
- Main IPC: G06T5/70
- IPC: G06T5/70 ; G06T5/50 ; G06T7/00

Abstract:
Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem. The one or more components include a deep learning model configured for denoising an image of a specimen generated by an imaging subsystem. The computer subsystem is configured for determining information for the specimen from the denoised image.
Public/Granted literature
- US20220383456A1 DEEP LEARNING IMAGE DENOISING FOR SEMICONDUCTOR-BASED APPLICATIONS Public/Granted day:2022-12-01
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