公开(公告)号：US20220383456A1

公开(公告)日：2022-12-01

申请号：US17721300

申请日：2022-04-14

Applicant: KLA Corporation

Inventor： Aditya Gulati ,  Raghavan Konuru ,  Niveditha Lakshmi Narasimhan ,  Saravanan Paramasivam ,  Martin Plihal ,  Prasanti Uppaluri

IPC: G06T5/00 ,  G06T7/00 ,  G06T5/50

Abstract: Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem. The one or more components include a deep learning model configured for denoising an image of a specimen generated by an imaging subsystem. The computer subsystem is configured for determining information for the specimen from the denoised image.

公开(公告)号：US12299848B2

公开(公告)日：2025-05-13

申请号：US17721300

申请日：2022-04-14

Applicant: KLA Corporation

Inventor： Aditya Gulati ,  Raghavan Konuru ,  Niveditha Lakshmi Narasimhan ,  Saravanan Paramasivam ,  Martin Plihal ,  Prasanti Uppaluri

IPC: G06T5/70 ,  G06T5/50 ,  G06T7/00

Abstract: Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem. The one or more components include a deep learning model configured for denoising an image of a specimen generated by an imaging subsystem. The computer subsystem is configured for determining information for the specimen from the denoised image.