Invention Grant
- Patent Title: Method for forming a three-dimensional semiconductor memory device with an improved etching step
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Application No.: US17940441Application Date: 2022-09-08
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Publication No.: US12302579B2Publication Date: 2025-05-13
- Inventor: Yong-Hoon Son , Jae Hoon Kim , Kwang-ho Park , Hyunji Song , Gyeonghee Lee , Seungjae Jung
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2019-0113457 20190916
- Main IPC: H10B43/40
- IPC: H10B43/40 ; H01L23/522 ; H01L23/528 ; H10B43/10 ; H10B43/27 ; H10B43/35

Abstract:
A semiconductor memory device is disclosed. The device includes a peripheral circuit structure on a substrate, a semiconductor layer on the peripheral circuit structure, an electrode structure on the semiconductor layer, the electrode structure including electrodes stacked on the semiconductor layer, a vertical channel structure penetrating the electrode structure and being connected to the semiconductor layer, a separation structure penetrating the electrode structure, extending in a first direction, and horizontally dividing the electrode of the electrode structure into a pair of electrodes, an interlayered insulating layer covering the electrode structure, and a through contact penetrating the interlayered insulating layer and being electrically connected to the peripheral circuit structure.
Public/Granted literature
- US20230005948A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2023-01-05
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