发明申请
- 专利标题: Method of manufacturing surface acoustic wave apparatuses
- 专利标题(中): 声表面波装置的制造方法
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申请号: US09799438申请日: 2001-03-05
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公开(公告)号: US20010029648A1公开(公告)日: 2001-10-18
- 发明人: Katsuhiro Ikada , Kenji Sakaguchi , Miki Takamiya
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Nagaokakyo-shi
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Nagaokakyo-shi
- 优先权: JP2000-072300 20000315
- 主分类号: H04R017/00
- IPC分类号: H04R017/00
摘要:
A method of manufacturing a surface acoustic wave apparatus including the steps of forming a first conductive film, depositing a first resist on the first conductive film and patterning the first resist, dry-etching the first conductive film using the patterned first resist to form IDT electrodes, a short-circuit wiring electrode for establishing electrical connection between IDT electrodes, and a second conductive film provided where the second surface acoustic wave device is constructed, removing the second conductive film, depositing a second resist and heating the second resist, patterning the second resist on the electrodes, forming a second conductive film having a thickness which is different from the first conductive film, removing the second resist to form the electrodes of the second surface acoustic wave device and to expose the electrodes of the first surface acoustic wave device, and disconnecting the short-circuit wiring electrode.
公开/授权文献
- US06367133B2 Method of manufacturing surface acoustic wave apparatus 公开/授权日:2002-04-09
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