公开(公告)号：US20040255443A1

公开(公告)日：2004-12-23

申请号：US10858473

申请日：2004-06-02

申请人： DENSO CORPORATION

发明人： Akio Iwase ,  Tetsuji Itou ,  Toshio Ooshima ,  Shige Kadotani

IPC分类号： H04R017/00 ,  H05K003/02

CPC分类号： H01L41/273 ,  H01L41/083 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49126 ,  Y10T29/49155

摘要： This invention is directed to providing a method for producing a stacked piezoelectric element, where grooves can be easily formed on the side face of a stacked body without causing damage. According to the invention, it is provided that a method for producing a stacked piezoelectric element by alternately stacking a piezoelectric layer and an inner electrode layer, comprising: a green sheet production step of producing a green sheet 110 for base, which constitutes a part of the piezoelectric layer; a unit body formation step of forming a unit body 3 having a narrow stacked part 30 where a narrow piezoelectric material layer 115, which constitutes a part of the piezoelectric layer, having an area smaller than the green sheet 110 for base and an electrode material layer 20, which constitutes the inner electrode layer, having an area smaller than the green sheet 110 for base are stacked, the unit body being formed by disposing the narrow stacked part 30 on the green sheet 110 for base; a stacked body formation step of forming a stacked body having groove parts by stacking a plurality of the unit bodies 3, the groove part having the bottom being defined by the side face of the narrow stacked part 30; and a firing step of firing the stacked body.

摘要翻译： 本发明的目的在于提供一种堆叠式压电元件的制造方法，其中可以容易地在堆叠体的侧面上形成槽而不会造成损坏。 根据本发明，提供了一种通过交替堆叠压电层和内部电极层来制造叠层压电元件的方法，包括：生坯基片的生片，其生成基片的生片110 压电层; 单元体形成步骤，形成具有窄堆叠部分30的单元体3，其中构成压电层的一部分的窄压电材料层115的面积小于用于基底的生片110的面积和电极材料层 如图20所示，构成内部电极层的区域小于用于基底的生片110的面积，通过将窄层叠部30设置在用于基底的生片110上而形成单位体; 层叠体形成步骤，通过堆叠多个单位体3形成具有沟槽部分的层叠体，所述槽部具有由窄层叠部30的侧面限定的底部; 以及烧结层叠体的烧成工序。

公开(公告)号：US20040201324A1

公开(公告)日：2004-10-14

申请号：US10834297

申请日：2004-04-28

申请人： NGK Insulators, ltd.

发明人： Yukihisa Takeuchi ,  Masashi Watanabe ,  Koji Kimura ,  Tatsuo Kawaguchi

IPC分类号： G02B026/00 ,  H01L041/08 ,  H01L041/04 ,  H04R017/00

CPC分类号： G02B6/12004 ,  G02B26/0858 ,  H01J5/54 ,  H01L27/20 ,  H01L41/0986 ,  H01L41/338 ,  H01L41/43 ,  Y10T29/42

摘要： A method of making a matrix type piezoelectric/electrostrictive device having a plurality of pillar shaped piezoelectric/electrostrictive elements, each having a piezoelectric/electrostrictive substance and at least a pair of electrodes being formed on the sides of the substance, are vertically provided on a thick ceramic substrate, such that the device is driven by displacement of the piezoelectric/electrostrictive substance. In this device, the piezoelectric/electrostrictive elements are integrally bonded to the ceramic substrate and independently arranged in two dimensions. The percentage of transgranularly fractured crystal grains on at least the sides of the piezoelectric/electrostrictive substance on which the electrodes are formed is 10% or less. The unit forms a curved surface near a joined section between the substance and the substrate.

摘要翻译： 制造具有多个柱状压电/电致伸缩元件的矩阵型压电/电致伸缩元件的方法，每个具有压电/电致伸缩物质和至少一对电极形成在物质的侧面上，垂直地设置在 使得该器件由压电/电致伸缩物质的位移驱动。 在该装置中，压电/电致伸缩元件一体地结合到陶瓷基板上，并且二维地独立地布置。 在形成电极的压电/电致伸缩物质的至少两侧的晶粒间断裂的晶粒的百分比为10％以下。 该单元在物质和基底之间的接合部分附近形成弯曲表面。

公开(公告)号：US20040200050A1

公开(公告)日：2004-10-14

申请号：US10819134

申请日：2004-04-07

申请人： TDK Corporation

发明人： Eiju Komuro

IPC分类号： H04R017/00

CPC分类号： H03H3/02 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A method of manufacturing a piezoelectric thin film resonator forms, after forming a piezoelectric film on a substrate so as to cover a lower electrode formed on the substrate, a resist layer so as to cover the piezoelectric film, forms a mask composed of the resist layer on the piezoelectric film by forming, in the resist layer, an exposure hole for exposing a formation part of an upper electrode on the piezoelectric film, forms an electrode material layer for forming the upper electrode on the piezoelectric film exposed via the exposure hole and on the mask, and then forms the upper electrode by removing the electrode material layer on the mask by removing the mask.

摘要翻译： 一种制造压电薄膜谐振器的方法，在基板上形成压电膜以覆盖形成在基板上的下电极之后形成抗蚀剂层以覆盖压电膜，形成由抗蚀剂层 通过在抗蚀剂层中形成用于使压电膜上的上电极的形成部分露出的曝光孔，形成在通过曝光孔暴露的压电膜上形成上电极的电极材料层，并且在 然后通过除去掩模去除掩模上的电极材料层形成上电极。

公开(公告)号：US20040085000A1

公开(公告)日：2004-05-06

申请号：US10694513

申请日：2003-10-27

申请人： Murata Manufacturing Co., Ltd.

发明人： Mitsugu Ogiura

IPC分类号： H04R017/00 ,  H01L041/04 ,  H05K003/36

CPC分类号： G01P15/0922 ,  Y10T29/42 ,  Y10T29/49004 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/49156 ,  Y10T29/49789 ,  Y10T29/49798

摘要： An acceleration sensor includes a piezoelectric element and support frames for supporting the ends of the piezoelectric element in the longitudinal direction. The piezoelectric element is formed by stacking an even number of piezoelectric layers greater than or equal to four layers. Electrodes are provided in between the layers and on the front and back faces of the piezoelectric element. The interlayer electrodes including a segmented electrode and lead electrodes are alternately stacked with the piezoelectric layers therebetween. The interlayer electrode in the middle in the thickness direction is a segmented electrode. The piezoelectric layers are polarized in the thickness direction so that charge having the same polarity is extracted from the electrodes when the acceleration is applied. Also, the center portion and both end portions of each piezoelectric layer are polarized in opposite directions.

摘要翻译： 加速度传感器包括压电元件和用于在纵向方向上支撑压电元件的端部的支撑框架。 压电元件通过层叠大于或等于四层的偶数个压电层而形成。 电极设置在层之间以及压电元件的正面和背面上。 包括分段电极和引线电极的层间电极与它们之间的压电层交替堆叠。 厚度方向中间的层间电极是分段电极。 压电层在厚度方向上极化，使得当施加加速度时，从电极中提取具有相同极性的电荷。 此外，每个压电层的中心部分和两个端部部分在相反的方向上极化。

公开(公告)号：US20040056563A1

公开(公告)日：2004-03-25

申请号：US10670730

申请日：2003-09-26

申请人： Murata Manufacturing Co., Ltd.

发明人： Katsumi Fujimoto

IPC分类号： H04R017/00 ,  H01L041/04 ,  H04R031/00

CPC分类号： H03H9/58 ,  G01C19/5642 ,  G01C19/5663 ,  H03H9/02244 ,  H03H9/02259 ,  H03H9/02338 ,  H03H9/60 ,  H03H2009/02496 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T29/4957

摘要： The present invention provides a composite vibrator that can maintain high sensitivity even when miniaturized. The composite vibrator includes tuning bar vibrators having the same length and support members for supporting the tuning bar vibrators. The tuning bar vibrators are arranged in a direction orthogonal to the longitudinal direction to be coupled with each other near nodes of bending vibrations occurring at both free ends of the tuning bar vibrators. In this arrangement, since the tuning bar vibrators are coupled with each other, the mass of the composite vibrator increases. Thus, even when the length of the longitudinal direction of the tuning bar vibrator is reduced, due to the increased mass, higher sensitivity for the detection of an angular velocity can be obtained.

摘要翻译： 本发明提供即使在小型化的情况下也能够保持高灵敏度的复合振动器。 复合振动器包括具有相同长度的调音杆振动器和用于支撑调音杆振动器的支撑构件。 调音杆振动器沿垂直于纵向方向的方向布置，以在调音杆振动器的两个自由端发生的弯曲振动的节点彼此耦合。 在这种布置中，由于调音棒振动器彼此耦合，所以复合振动器的质量增加。 因此，即使当调音杆振动器的长度方向的长度减小时，由于质量的增加，也可以获得用于检测角速度的较高灵敏度。

公开(公告)号：US20040047239A1

公开(公告)日：2004-03-11

申请号：US10241380

申请日：2002-09-11

发明人： Kim C. Benjamin

IPC分类号： H04R017/00

CPC分类号： B06B1/0637 ,  B06B1/0633 ,  B06B1/0685 ,  Y10S310/80

摘要： An underwater acoustic transducer includes a set of formed substrates of piezoelectric polymer composite, the formed substrates having at least a first and second surface. Conductive electrodes are deposited on the first and second sides of the formed substrates. One surface of the substrate is bonded to an acoustically absorptive backing material. Either surface can be made to conform to a singly or doubly curved geometry. Electrodes deposited on these substrates may be continuous to form a single transducer element, or segmented to form sub-arrays of transducer elements.

摘要翻译： 水下声换能器包括一组形成压电聚合物复合材料的基底，所形成的基底至少具有第一和第二表面。 导电电极沉积在所形成的衬底的第一和第二侧上。 衬底的一个表面粘合到吸声背衬材料上。 任一表面都可以制成符合单曲或双曲的几何形状。 沉积在这些基板上的电极可以是连续的以形成单个换能器元件，或者被分段以形成换能器元件的子阵列。

公开(公告)号：US20040021398A1

公开(公告)日：2004-02-05

申请号：US10380547

申请日：2003-05-28

发明人： W. Joe East

IPC分类号： H01L041/04 ,  H05K003/20 ,  H04R017/00

CPC分类号： F04B43/04 ,  F04B43/046 ,  H01L41/042 ,  H01L41/0477 ,  H01L41/0973 ,  H01L41/29 ,  Y10T29/42 ,  Y10T29/49128

摘要： A method of manufacturing piezoelectric actuators (14) is disclosed along with a minimum diaphragm pump (10) using the actuators. The object was an actuator which could be used in miniature diaphragm pumps and other applications and which would be smaller in size and simpler to manufacture than prior art actuators, yet would provide forces and displacements an order of magnitude higher than any previously known devices of similar size. The pump (10) incorporates the new actuator along with a novel one-way valve (200) and a small driver circuit (18). The pump is of direct application in the liquid cooling systems of small computers, and in other fluid systems.

摘要翻译： 公开了制造压电致动器（14）的方法以及使用致动器的最小隔膜泵（10）。 该物体是可用于微型隔膜泵和其他应用的致动器，其尺寸更小并且比现有技术的致动器更容易制造，但是将提供比先前已知的任何相似装置高的数量级的力和位移 尺寸。 泵（10）包括新的致动器以及新颖的单向阀（200）和小的驱动器回路（18）。 该泵可直接应用于小型计算机和其他流体系统的液体冷却系统中。

公开(公告)号：US20030235115A1

公开(公告)日：2003-12-25

申请号：US10182655

申请日：2003-03-05

发明人： Raymond Porzio

IPC分类号： H04R017/00

CPC分类号： H04R15/02 ,  B06B1/0614 ,  B06B1/0618 ,  B06B1/0655 ,  B06B2201/74 ,  G10K9/121 ,  G10K9/125

摘要： A longitudinal vibrator assembly comprising at least one piezoceramic, magnetostrictive or electrostrictive transducer (130) having a coaxial housing (200a, 200b or 200c) comprised of at least one slotted or complete cylindrical flexural member vibrating in a circumferential or radial direction and excited by a solid state transduction material.

摘要翻译： 一种纵向振动器组件，包括至少一个具有同轴壳体（200a，200b或200c）的压电陶瓷，磁致伸缩或电致伸缩换能器（130），所述同轴壳体包括至少一个在周向或径向方向上振动并且被一个 固态转导材料。

公开(公告)号：US20030208892A1

公开(公告)日：2003-11-13

申请号：US10281373

申请日：2002-10-25

申请人： NGK Insulators, Ltd.

发明人： Yukihisa Takeuchi ,  Kazuyoshi Shibata ,  Masahiko Namerikawa

IPC分类号： H04R017/00

CPC分类号： H01L41/094 ,  H01L41/0831 ,  H01L41/0946 ,  H01L41/0953 ,  H01L41/273 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/49574 ,  Y10T29/49789 ,  Y10T29/49798

摘要： A piezoelectric/electrostrictive (P/E) device includes a pair of mutually opposing metal thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. One or more piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. Any one of the movable section and the fixation section has mutually opposing end surfaces, and a distance between the end surfaces is not less than the axial length of the movable section.

摘要翻译： 压电/电致伸缩（P / E）装置包括一对相互相对的金属薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。 一个或多个压电/电致伸缩元件布置在该对薄板部分的至少一个薄板部分上。 可动部和固定部中的任一个具有相互相对的端面，并且端面之间的距离不小于可动部的轴向长度。

公开(公告)号：US20030206490A1

公开(公告)日：2003-11-06

申请号：US10138348

申请日：2002-05-03

申请人： Image Acoustics, Inc.

发明人： John L. Butler ,  Alexander L. Butler

IPC分类号： H04R017/00

CPC分类号： G10K9/121 ,  H02N2/043 ,  H04R17/00

摘要： An electro-mechanical transducer, which provides amplified piston motion from an orthogonal drive direction wherein the electro-mechanical drive additionally provides the inertial reactive mass for the moving mass of the piston. The piston motion is amplified by lever arms, which are typically attached to a piezoelectric or electrostrictive drive system. The arrangement allows a compact, high output transducer design.

摘要翻译： 一种机电传感器，其从正交驱动方向提供放大的活塞运动，其中机电驱动器另外为活塞的运动质量提供惯性反作用质量。 活塞运动由杠杆臂放大，杠杆臂通常连接到压电或电致伸缩驱动系统。 该布置允许紧凑的高输出传感器设计。