Invention Application
- Patent Title: System for processing a workpiece
- Patent Title (中): 用于加工工件的系统
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Application No.: US09922362Application Date: 2001-08-02
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Publication No.: US20010047757A1Publication Date: 2001-12-06
- Inventor: Gary L. Curtis , Raymon F. Thompson
- Applicant: SEMITOOL, INC.
- Applicant Address: null
- Assignee: SEMITOOL, INC.
- Current Assignee: SEMITOOL, INC.
- Current Assignee Address: null
- Main IPC: C23C016/00
- IPC: C23C016/00

Abstract:
An apparatus for processing a workpiece in a micro-environment includes a workpiece housing connected to a motor for rotation. The workpiece housing defines a substantially closed processing chamber therein in which one or more processing fluids are distributed across at least one face of the workpiece by centrifugal force generated during rotation of the housing. A dividing member at the edge of the spinning workpiece separates flow of fluids off of the top and bottom surfaces of the workpiece.
Public/Granted literature
- US06660098B2 System for processing a workpiece Public/Granted day:2003-12-09
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