Invention Application
US20020020872A1 Memory cell of the EEPROM type having its threshold adjusted by implantation
审中-公开
具有通过植入调整其阈值的EEPROM类型的存储单元
- Patent Title: Memory cell of the EEPROM type having its threshold adjusted by implantation
- Patent Title (中): 具有通过植入调整其阈值的EEPROM类型的存储单元
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Application No.: US09976484Application Date: 2001-10-12
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Publication No.: US20020020872A1Publication Date: 2002-02-21
- Inventor: Carlo Cremonesi , Bruno Vajana , Roberta Bottini , Giovanna Dalla Libera
- Applicant: STMicroelectronics S.r.I.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.I.
- Current Assignee: STMicroelectronics S.r.I.
- Current Assignee Address: IT Agrate Brianza
- Priority: ITMI98A002334 19981030
- Main IPC: H01L029/788
- IPC: H01L029/788 ; H01L029/76 ; H01L029/792

Abstract:
A process formes a structure incorporating at least one circuitry transistor and at least one non-volatile memory cell of the EEPROM type with two self-aligned polysilicon levels having a storage transistor and an associated selection transistor in a substrate of semiconductor material including field oxide regions bounding active area regions. The process comprises the steps of in the active area regions, forming a gate oxide layer and defining a tunnel oxide region included in the gate oxide layer depositing and partly defining a first polysilicon layer forming an interpoly dielectric layer and removing the interpoly dielectric layer at least at the circuitry transistor depositing a second polysilicon layer selectively etching away the second polysilicon layer at the cell, and the first and second polysilicon layers at the circuitry transistor and selectively etching away the interpoly dielectric layer and the first polysilicon layer at the cell. After forming and before partially defining the first polysilicon layer, the process implants at least at the channel region of the floating-gate storage transistor for adjusting the transistor threshold.
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