Invention Application
- Patent Title: Optically controlled MEM switches
- Patent Title (中): 光控MEM开关
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Application No.: US09978314Application Date: 2001-10-15
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Publication No.: US20020023999A1Publication Date: 2002-02-28
- Inventor: Tsung-Yuan Hsu , Robert Y. Loo , Greg Tangonan , Juan F. Lam
- Applicant: HRL Laboratories
- Applicant Address: null
- Assignee: HRL Laboratories
- Current Assignee: HRL Laboratories
- Current Assignee Address: null
- Main IPC: G02B007/04
- IPC: G02B007/04

Abstract:
An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactuate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.
Public/Granted literature
- US06639205B2 Optically controlled MEM switches Public/Granted day:2003-10-28
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