Invention Application
US20020052177A1 Supporting device for a plurality of adapter chucks 失效
用于多个适配器卡盘的支撑装置

Supporting device for a plurality of adapter chucks
Abstract:
A supporting device for a plurality of adapter chucks for the precision grinding or polishing of optical components comprises a spindle shaft having a central bore for supplying one of a gas and a vacuum, at least one arm adjustably supported by a head of the spindle shaft and having a seating for an adapter chuck, and a flexible vacuum/gas line provided between the seating and the spindle shaft. The arm is adjustable as to its angle of inclination relative to an axis of the spindle shaft.
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