Invention Application
- Patent Title: Structure for a semiconductor resistive element, particularly for high voltage applications and respective manufacturing process
- Patent Title (中): 用于半导体电阻元件的结构,特别适用于高电压应用和相应的制造工艺
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Application No.: US09991555Application Date: 2001-11-21
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Publication No.: US20020063307A1Publication Date: 2002-05-30
- Inventor: Davide Patti
- Applicant: STMicroelectronics S.r.I.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.I.
- Current Assignee: STMicroelectronics S.r.I.
- Current Assignee Address: IT Agrate Brianza
- Priority: ITTO2000A001100 20001124
- Main IPC: H01L027/01
- IPC: H01L027/01 ; H01L027/12 ; H01L031/0392 ; H01L029/76 ; H01L031/062 ; H01L029/94 ; H01L031/119 ; H01L021/20 ; H01L029/00 ; H01L023/62 ; H01L031/113 ; H01L027/082 ; H01L027/102 ; H01L029/70 ; H01L031/11

Abstract:
A structure for a semiconductor resistive element, applicable in particular to power components, having a high concentration substrate of the n type, a first epitaxial layer of the n type, a region of the p type arranged on said first epitaxial layer so to form the resistive element proper, a second epitaxial layer of n type grown on said first epitaxial layer to make the region of the p type a buried region, and an additional layer of the n type with a higher concentration with respect to the second epitaxial level, positioned on the embedded region. Low resistivity regions of the p type adapted to make low resistivity deep contacts for the resistor are provided. The buried region can be made either with a development that is substantially uniform in its main direction of extension or so to present, at on part of its length, a structure of adjacent subregions in marginal continuity. In this way, either a resistive element presenting a substantially linear performance in all ranges of applied voltage or a resistive element presenting a marked increase of the resistance value as the applied voltage increases can be made. This all with the additional possibility of selectively varying the resistance value demonstrated before the increase.
Public/Granted literature
- US06590272B2 Structure for a semiconductor resistive element, particularly for high voltage applications Public/Granted day:2003-07-08
Information query