Invention Application
- Patent Title: Film forming apparatus and film forming method
- Patent Title (中): 成膜装置及成膜方法
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Application No.: US10006648Application Date: 2001-12-10
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Publication No.: US20020071909A1Publication Date: 2002-06-13
- Inventor: Noriyoshi Shida , Makoto Okano , Keiji Suga
- Applicant: PIONEER CORPORATION
- Applicant Address: null
- Assignee: PIONEER CORPORATION
- Current Assignee: PIONEER CORPORATION
- Current Assignee Address: null
- Priority: JPP.2000-377405 20001212; JPP.2000-377406 20001212
- Main IPC: B05D003/12
- IPC: B05D003/12

Abstract:
The film forming apparatus comprises: a turntable 1 which rotates an optical disc substrate 3; and a film forming liquid supplying device 2 which supplies an ultraviolet curing resin 4 onto the optical disc substrate 3. While the optical disc substrate 3 is rotated by the turntable 1, the ultraviolet curing resin 4 is supplied onto the optical disc substrate 3 by the film forming liquid supplying device 2.
Information query