Invention Application
US20020071909A1 Film forming apparatus and film forming method 审中-公开
成膜装置及成膜方法

Film forming apparatus and film forming method
Abstract:
The film forming apparatus comprises: a turntable 1 which rotates an optical disc substrate 3; and a film forming liquid supplying device 2 which supplies an ultraviolet curing resin 4 onto the optical disc substrate 3. While the optical disc substrate 3 is rotated by the turntable 1, the ultraviolet curing resin 4 is supplied onto the optical disc substrate 3 by the film forming liquid supplying device 2.
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