Invention Application
US20020074902A1 Method of bonding piezoelectric element and electrode, and piezoelectric microactuator using the bonding method
失效
压电元件与电极的接合方法以及使用该接合方法的压电微型致动器
- Patent Title: Method of bonding piezoelectric element and electrode, and piezoelectric microactuator using the bonding method
- Patent Title (中): 压电元件与电极的接合方法以及使用该接合方法的压电微型致动器
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Application No.: US09822636Application Date: 2001-03-30
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Publication No.: US20020074902A1Publication Date: 2002-06-20
- Inventor: Masayuki Kitajima , Yutaka Noda , Seiichi Shimoura , Toru Okada , Masanao Fujii , Kenji Iketaki , Hidehiko Kobayaski , Masakazu Takesue , Keiichi Yamamoto , Hisao Tanaka
- Applicant: FUJITSU LIMITED
- Applicant Address: null
- Assignee: FUJITSU LIMITED
- Current Assignee: FUJITSU LIMITED
- Current Assignee Address: null
- Priority: JP2000-335867 20001102
- Main IPC: H01L041/04
- IPC: H01L041/04

Abstract:
A method of bonding a piezoelectric element and an electrode, including the steps of forming a first coating of a material selected from the group consisting of Au, Al, Zn, Cu, and Sn on a bonding surface of the piezoelectric element, and forming a second coating of a material selected from the group consisting of Au, Al, Zn, Cu, and Sn on a bonding surface of the electrode. The combination of the materials of the first and second coatings is preferably Au/Au, Au/Al, Zn/Cu, or Sn/Cu. The method further includes the step of bringing the first and second coatings into close contact with each other and heating them under pressure to form a metallic bond or intermetallic compound between the first and second coatings, thereby bonding the piezoelectric element and the electrode.
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