Invention Application
US20020079449A1 SEM having a detector surface segmented into a number of separate regions
审中-公开
SEM将检测器表面分割成多个分开的区域
- Patent Title: SEM having a detector surface segmented into a number of separate regions
- Patent Title (中): SEM将检测器表面分割成多个分开的区域
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Application No.: US10011618Application Date: 2001-12-06
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Publication No.: US20020079449A1Publication Date: 2002-06-27
- Inventor: Marcellinus Petrus Carolus Michael Krijn , Jan Martijn Krans
- Priority: EP00204432.9 20001211
- Main IPC: H01J037/28
- IPC: H01J037/28 ; H01J037/244
Abstract:
The invention relates to a SEM with an electrostatic objective lens 14, 16 and a detector 6, 8 for through-the-lens detection of electrons 24. In accordance with the invention a voltage contrast (voltage range of the order of magnitude of from 1 to 10 V) is achieved by subdividing this detector surface 9 into separate regions, preferably concentric annular regions 36 and 38, and by electronically combining the signals from these regions.
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