公开(公告)号：US20040227081A1

公开(公告)日：2004-11-18

申请号：US10875178

申请日：2004-06-25

Inventor： Mitsugu Sato ,  Hideo Todokoro

IPC: H01J037/28

CPC classification number: H01J37/1474 ,  H01J37/05 ,  H01J37/153 ,  H01J2237/1536 ,  H01J2237/2817

Abstract: An electron beam (4) to be irradiated onto a sample (10) is two-dimensionally scanned by a scanning coil (9), and secondary electrons generated from the sample (10) by the scanning are detected by a secondary electron detector (13). A deflection coil (15) for image shifting is used for electrically deflecting the primary electron beam to shift a field of view for image shift in an arbitrary direction by an arbitrary amount. By the image shift, the primary electron beam (4) to be irradiated onto the sample is energy dispersed to degrade the resolution. However, an EnullB field producer (30) for dispersion control gives the primary electron beam energy dispersion in the opposite direction and having the equal magnitude. Therefore, the energy dispersion produced in the primary electron beam by the image shift is automatically corrected.

Abstract translation: 通过扫描线圈（9）对被照射在样品（10）上的电子束（4）进行二维扫描，用二次电子检测器（13）检测从样品（10）通过扫描产生的二次电子 ）。 用于图像偏移的偏转线圈（15）用于使一次电子束电偏转以使任意方向上的图像偏移的视场移动任意量。 通过图像偏移，待照射到样品上的一次电子束（4）能量分散以降低分辨率。 然而，用于色散控制的ExB场生成器（30）给出相反方向上的一次电子束能量色散并且具有相等的幅度。 因此，通过图像偏移在一次电子束中产生的能量色散被自动校正。

公开(公告)号：US20040188611A1

公开(公告)日：2004-09-30

申请号：US10750838

申请日：2004-01-05

Inventor： Shuichi Takeuchi ,  Mine Nakagawa ,  Mitsugu Sato ,  Atsushi Takane ,  Kazutaka Nimura

IPC: H01J037/28 ,  G01N023/225

CPC classification number: H01J37/21 ,  H01J37/28

Abstract: The invention provides a sample observation method capable of understanding the three-dimensional shape of a sample in a wider range. The observation method of the invention calculates heights (height differences) in the whole domain of an image, from plural sheets of images of different field-of-view angles, being in focus over the whole image, attained by means of the focal depth expanding function to thereby create a map (Z map) of the height information by each pixel, and displays a three-dimensional image as a bird's-eye view. The method also displays to superpose a Z map attained from image signals reflecting the surface structure on a Z map attained from image signals reflecting the composition information with different colors, which makes it possible to clearly understand the spatial distribution of a substance of unique composition inside the sample.

Abstract translation: 本发明提供一种能够更宽范围地理解样品的三维形状的样本观察方法。 本发明的观察方法，通过使焦点深度扩大获得的图像的整个图像的整个区域的高度（高度差）从不同的视野角的多张图像对焦在整个图像上。 功能，从而由每个像素创建高度信息的地图（Z图），并将三维图像显示为鸟瞰图。 该方法还显示为从反映具有不同颜色的合成信息的图像信号获得的Z映射上反映表面结构的图像信号中叠加的Z映射，这使得可以清楚地了解内部独特成分的物质的空间分布 例子。

公开(公告)号：US20040113074A1

公开(公告)日：2004-06-17

申请号：US10730106

申请日：2003-12-09

Applicant: Hitachi, Ltd.

Inventor： Naomasa Suzuki ,  Toshiro Kubo ,  Noriaki Arai ,  Mitsugu Sato ,  Hideo Todokoro ,  Yoichi Ose

IPC: H01J037/28

CPC classification number: H01J37/28 ,  H01J2237/04753 ,  H01J2237/04756

Abstract: Image observation at high resolution is realized and irregularity information of a sample is obtained. The reflected electrons 12a emitted in a direction at a small angle with the surface of the sample 8 are detected by the detectors 10a and 10b arranged on the side of the electron source 1 of the magnetic field leakage type object lens 7 and a sample image is formed. Irregularity information of the sample is obtained from the effects of light and shade appearing in the sample image.

Abstract translation: 实现高分辨率的图像观察，获得样品的不规则信息。 通过设置在磁场泄漏型物镜7的电子源1侧的检测器10a，10b来检测与样品8的表面小角度方向发射的反射电子12a，样本图像为 形成。 从样本图像中出现的光和阴影的效果获得样本的不规则信息。

公开(公告)号：US20030218133A1

公开(公告)日：2003-11-27

申请号：US10154530

申请日：2002-05-22

Applicant: Applied Materials Israel Ltd

Inventor： Igor Petrov ,  Zvika Rosenberg

IPC: H01J037/28

CPC classification number: H01J37/28 ,  H01J37/1472 ,  H01J37/153 ,  H01J37/244

Abstract: A method and charged particle beam column are presented for directing a primary charged particle beam onto a sample. The primary charged particle beam, propagating along an initial axis of beam propagation towards a focusing assembly, passes through a beam shaper, that affects the cross section of the primary charged particle beam to compensate for aberrations of focusing caused by astigmatism effect of a focusing field produced by an objective lens arrangement of the focusing assembly, and then passes through a beam axis alignment system, that aligns the axis of the primary charged particle beam with respect to the optical axis of the objective lens arrangement.

Abstract translation: 提出了一种方法和带电粒子束柱，用于将初级带电粒子束引导到样品上。 沿着波束传播的初始轴向聚焦组件传播的主要带电粒子束通过束形成器，其影响初级带电粒子束的横截面以补偿由聚焦场的散光效应引起的聚焦像差 由聚焦组件的物镜布置产生，然后通过光束轴对准系统，其使主要带电粒子束的轴线相对于物镜装置的光轴对准。

公开(公告)号：US20030071214A1

公开(公告)日：2003-04-17

申请号：US10246453

申请日：2002-09-19

Inventor： Goroku Shimoma ,  Tadashi Otaka ,  Mitsugu Sato ,  Hideo Todokoro ,  Shunichi Watanabe ,  Tadanori Takahashi ,  Masahiro Kawawa ,  Masanori Gunji ,  Terumichi Nishino

IPC: H01J037/28

CPC classification number: H01J37/28 ,  H01J2237/2814

Abstract: A width-measurement method of reducing or eliminating an error in measurement of a width of an object on a sample resulting from the dimension of the beam diameter, wherein a width-measured value of the object to be width-measured which has been obtained on the basis of a secondary signal obtained from secondary particles emitted from the sample having thereon the object to be width-measured is corrected with a value with respect to a dimension value of a beam diameter.

Abstract translation: 一种宽度测量方法，用于减少或消除由光束直径尺寸导致的样品宽度测量误差，其中宽度测量对象的宽度测量值已经在 从其上具有待宽度测量对象的样品发射的二次粒子获得的二次信号的基础用相对于束直径的尺寸值的值进行校正。

公开(公告)号：US20020109088A1

公开(公告)日：2002-08-15

申请号：US10116059

申请日：2002-04-05

Inventor： Yasuhiko Nara ,  Kazuhisa Machida ,  Mari Nozoe ,  Hiroshi Morioka ,  Yasutsugu Usami ,  Takashi Hiroi ,  Kohichi Hayakawa ,  Maki Ito

IPC: H01J037/28

CPC classification number: G03F7/70616 ,  G03F1/84 ,  G03F7/7065 ,  G06T7/001 ,  G06T2207/30141 ,  H01J37/226 ,  H01J2237/082 ,  H01J2237/2817 ,  H01L22/12

Abstract: Inspection method, apparatus, and system for a circuit pattern, in which when various conditions which are necessary in case of inspecting a fine circuit pattern by using an image formed by irradiating white light, a laser beam, or a charged particle beam are set, its operating efficiency can be improved. An inspection target region of an inspection-subject substrate is displayed, and a designated map picture plane and an image of an optical microscope or an electron beam microscope of a designated region are displayed in parallel, thereby enabling a defect distribution and a defect image to be simultaneously seen. Item names of inspecting conditions and a picture plane to display, input, or instruct the contents of the inspecting conditions are integrated, those contents are overlapped to the picture plane and layer-displayed, and all of the item names are displayed in parallel in a tab format in the upper portion of the picture plane of the contents. When a desired item name is clicked, the picture plane is switched and the contents corresponding to the clicked item name are displayed.

公开(公告)号：US20020088941A1

公开(公告)日：2002-07-11

申请号：US10021332

申请日：2001-10-29

Inventor： Akira Yonezawa

IPC: H01J037/28

CPC classification number: H01J37/145 ,  H01J37/28 ,  H01J2237/244 ,  H01J2237/281

Abstract: The secondary electrons, from a sample placed within a lens magnetic field, are detected by a plurality of secondary electron detectors, thereby effectively observing a concave/convex in a sample surface. In a scanning electronic beam apparatus having upper and lower electrodes built in a single-pole magnetic-field type lens to place a sample within a lens magnetic field, a negative voltage is applied to the sample and the lower electrode opposed thereto while a zero or positive voltage is applied to the upper electrode, whereby an electric field for suppressing the helical motion of a secondary electron given off from the sample due to electron-beam irradiation is caused within a region of from the sample to an objective lens magnetic field space closer to an electron source. The secondary electron is detected by a division-type MCP or a plurality of scintillator-type secondary electron detectors arranged sandwiching the optical axis.

Abstract translation: 来自放置在透镜磁场内的样品的二次电子被多个二次电子检测器检测，从而有效地观察样品表面中的凹/凸。 在具有内置在单极磁场型透镜中的上电极和下电极以将样品置于透镜磁场内的扫描电子束装置中，对与其相对的样品和下电极施加负电压，同时将零或 向上部电极施加正电压，从而在从样品到物镜的磁场空间更靠近的区域内产生用于抑制由于电子束照射而从样品发出的二次电子的螺旋运动的电场 到电子源。 二次电子由分割型MCP或多个闪烁体型二次电子检测器检测，其夹持光轴。

公开(公告)号：US20020079449A1

公开(公告)日：2002-06-27

申请号：US10011618

申请日：2001-12-06

Inventor： Marcellinus Petrus Carolus Michael Krijn ,  Jan Martijn Krans

IPC: H01J037/28 ,  H01J037/244

CPC classification number: H01J37/28 ,  H01J2237/24465 ,  H01J2237/24485 ,  H01J2237/24564 ,  H01J2237/2817

Abstract: The invention relates to a SEM with an electrostatic objective lens 14, 16 and a detector 6, 8 for through-the-lens detection of electrons 24. In accordance with the invention a voltage contrast (voltage range of the order of magnitude of from 1 to 10 V) is achieved by subdividing this detector surface 9 into separate regions, preferably concentric annular regions 36 and 38, and by electronically combining the signals from these regions.

Abstract translation: 本发明涉及具有静电物镜14,16和用于通过透镜检测电子24的检测器6,7的SEM。根据本发明，电压对比度（电压范围为1级数量级 至10V）通过将该检测器表面9细分成分离的区域，优选地同心环形区域36和38以及通过电子组合来自这些区域的信号来实现。

公开(公告)号：US20040232332A1

公开(公告)日：2004-11-25

申请号：US10847885

申请日：2004-05-19

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION ,  HITACHI SCIENCE SYSTEMS, LTD.

Inventor： Takehiko Konno ,  Hiroshi Miyai

IPC: H01J037/28

CPC classification number: H01J37/3045 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2817 ,  H01L22/12 ,  H01L22/20

Abstract: An inspection system includes a SEM visual inspection apparatus for detecting a defect in a semiconductor sample in steps of manufacturing a semiconductor device and a review apparatus for observing, at a high resolution, the defect in the semiconductor sample detected by the SEM visual inspection apparatus. The system has a function of transmitting an alignment dictionary image as one of alignment parameters to be set by the SEM visual inspection apparatus using an inspection recipe to the review apparatus.

Abstract translation: 一种检查系统包括用于在制造半导体器件的步骤中检测半导体样品中的缺陷的SEM目视检查装置和用于以高分辨率观察由SEM目视检查装置检测的半导体样品中的缺陷的检查装置。 该系统具有将对准字典图像作为将由SEM目视检查装置使用检查配方设置的对准参数之一传送给检查装置的功能。

公开(公告)号：US20040222375A1

公开(公告)日：2004-11-11

申请号：US10779749

申请日：2004-02-18

Inventor： Yoshihiro Kimura ,  Osamu Komuro ,  Fumihiro Sasajima

IPC: G01N023/225 ,  H01J037/28

CPC classification number: G01B15/08 ,  H01J37/28 ,  H01J2237/2814 ,  H01J2237/2817

Abstract: A method and apparatus suitable for determining the concavity and convexity of line and space patterns formed on a sample. A profile is formed based on a charged-particle beam scan, the profile having a peak. When one foot portion of the peak converges more gradually than the other foot portion, a portion of the sample corresponding to the one foot portion is determined to be a convex portion. Alternatively, when one foot portion of the peak converges more steeply than the other foot portion, a portion of the sample corresponding to the one foot portion is determined to be a concave portion.

Abstract translation: 适用于确定在样品上形成的线和空间图案的凹凸的方法和装置。 基于带电粒子束扫描形成轮廓，轮廓具有峰值。 当峰的一个脚部比另一个脚部更加逐渐收敛时，与一个脚部相对应的部分样本被确定为凸部。 或者，当峰的一个脚部比另一个脚部收敛得更陡峭时，与一个脚部对应的样本的一部分被确定为凹部。