A method and apparatus for ultrasonic assisted deposition of a release agent onto a workpiece is disclosed. The release agent can be any fluorinated or non-fluorinated phosphorous-containing organic acid. The workpiece can be any workpiece desired to be coated with the release agent, such as a surface needing an anti-stick coating required in a plastic casting or injection mold. Metal oxide workpiece surfaces strongly bond to fluorinated phosphorus-containing organic acids. In particular, the present invention can deposit anti-stick coatings onto smooth or porous surfaces, such as anodized aluminum and its alloys, using ultrasonic assisted deposition