Invention Application
- Patent Title: Lens assembly for electron beam column
- Patent Title (中): 电子束柱透镜组件
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Application No.: US09797955Application Date: 2001-03-05
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Publication No.: US20020148971A1Publication Date: 2002-10-17
- Inventor: Michael Sogard
- Main IPC: H01J003/26
- IPC: H01J003/26
Abstract:
A lens assembly for use with an electron beam optical system operating in a vacuum. The lens assembly includes a housing forming a sealed enclosure and at least one lens disposed within the housing. The housing includes a port for connection to a vacuum source for creating a vacuum in the sealed enclosure. A method of creating a vacuum within the lens assembly is also disclosed.
Information query
