发明申请
- 专利标题： Method for producing micromechanical structures
- 专利标题（中）： 微机械结构的制造方法
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申请号： US10178253申请日： 2002-06-24
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公开(公告)号： US20020170175A1公开(公告)日： 2002-11-21
- 发明人: Robert Aigner , Florian Plotz , Sven Michaelis , Michael Brauer
- 优先权： DE19962231.0 19991222
- 主分类号： H01R043/00
- IPC分类号： H01R043/00 ; H05K003/36
摘要：
A micromechanical structure is described which is disposed on a base body and requires protection from environmental influences by a covering body. Furthermore, electrical contacts are necessary for establishing contacts for the micromechanical structure. By skillfully carrying out a sawing-into operation and a sawing-through operation, it is possible to expose the electrical contact.
公开/授权文献
- US06839962B2 Method of producing micromechanical structures 公开/授权日：2005-01-11
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