发明申请
- 专利标题: Apparatus and method for measuring Hall effect
- 专利标题(中): 用于测量霍尔效应的装置和方法
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申请号: US09996083申请日: 2001-11-28
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公开(公告)号: US20020175679A1公开(公告)日: 2002-11-28
- 发明人: Hoon Kim , Yasushi Nagamune , Geun-Taek Lee , Suk-Hwan Chung
- 优先权: KR83402/2000 20001204; KR30181/2001 20010530; KR55598/2001 20010910
- 主分类号: G01N027/72
- IPC分类号: G01N027/72 ; G01R033/12
摘要:
Disclosed are apparatus and method for measuring Hall effect related-values in a semiconductor, such as a mobility, a carrier concentration and a resistivity using a Hall effect. A sample is loaded into an IC socket or a similar target, which is fixed on the inside of a heat insulating material container capable of containing injected liquid nitrogen. The Hall effect related-values are measured using a moving member for moving a pair of permanent magnets to an outside of the heat insulating material container. The measuring equipment has a simple structure, and a measuring operation is simple. A level of an input voltage of a sample is measured depending on a constant current that is supplied by a constant current supplying unit contained in a Hall voltage measurement unit. A measurement error detection unit detects and displays a measurement error of the sample using the level of the measured input voltage. Since the measurement error is detected before measuring the Hall effect, the measurement error can be excluded.
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