发明申请
US20020175679A1 Apparatus and method for measuring Hall effect 审中-公开
用于测量霍尔效应的装置和方法

  • 专利标题: Apparatus and method for measuring Hall effect
  • 专利标题(中): 用于测量霍尔效应的装置和方法
  • 申请号: US09996083
    申请日: 2001-11-28
  • 公开(公告)号: US20020175679A1
    公开(公告)日: 2002-11-28
  • 发明人: Hoon KimYasushi NagamuneGeun-Taek LeeSuk-Hwan Chung
  • 优先权: KR83402/2000 20001204; KR30181/2001 20010530; KR55598/2001 20010910
  • 主分类号: G01N027/72
  • IPC分类号: G01N027/72 G01R033/12
Apparatus and method for measuring Hall effect
摘要:
Disclosed are apparatus and method for measuring Hall effect related-values in a semiconductor, such as a mobility, a carrier concentration and a resistivity using a Hall effect. A sample is loaded into an IC socket or a similar target, which is fixed on the inside of a heat insulating material container capable of containing injected liquid nitrogen. The Hall effect related-values are measured using a moving member for moving a pair of permanent magnets to an outside of the heat insulating material container. The measuring equipment has a simple structure, and a measuring operation is simple. A level of an input voltage of a sample is measured depending on a constant current that is supplied by a constant current supplying unit contained in a Hall voltage measurement unit. A measurement error detection unit detects and displays a measurement error of the sample using the level of the measured input voltage. Since the measurement error is detected before measuring the Hall effect, the measurement error can be excluded.
信息查询
0/0