公开(公告)号：US20040217759A1

公开(公告)日：2004-11-04

申请号：US10709106

申请日：2004-04-14

发明人： Gary L. Burkhardt ,  Alfred E. Crouch ,  Jay L. Fisher

IPC分类号： G01N027/72

CPC分类号： G01N27/902

摘要： The system and method provides a means for inspecting pipelines that have obstructions which prevent conventional inspection pigs from passing the obstructions. The invention is a system and method that uses remote-field eddy current inspection techniques and a uniquely configured excitation coil for inline inspection of pipelines having valves and other fittings that severely restrict or prevent the use of conventional inspection pigs. The invention relies on a unique collapsible excitation coil and a collapsible sensor array that enables an inspection pig incorporating the invention to pass pipeline obstructions that prevent passage by conventional inspection pigs. The invention provides a means for reducing the diameter of the inspection pig to enable it to pass obstructions in the pipeline.

公开(公告)号：US20040189290A1

公开(公告)日：2004-09-30

申请号：US10623953

申请日：2003-07-21

申请人： KLA-Tencor Corporation

发明人： Kurt R. Lehman ,  Shing M. Lee ,  Walter Halmer Johnson III ,  John Fielden

IPC分类号： G01B007/06 ,  G01N027/72

CPC分类号： G01N27/72

摘要： A method for measuring conductance of a sample using an eddy current probe with a sensing coil. The method includes N repetitions of measuring first and second voltage pairs including in-phase and quadrature components of an induced AC voltage in the sensing coil, calibrating the first signal based on the measured second signal at a different separation from the sample and reference material, determining a conductance function relating conductance with location along the selected curve, processing the calibrated first voltage pairs to generate a lift-off curve, determining an intersection voltage pair representing intersection of the lift-off curve with a selected curve, and determining the conductance of the sample from the intersection voltage pair and the conductance function.

摘要翻译： 使用具有感测线圈的涡流探头测量样品的电导率的方法。 该方法包括测量包括感测线圈中的感应AC电压的同相和正交分量的第一和第二电压对的N次重复，基于在与样本和参考材料不同的分离处测量的第二信号来校准第一信号， 确定与所选择的曲线相关的电导与位置的电导函数，处理校准的第一电压对以产生剥离曲线，确定表示取出曲线与选定曲线的交点的交叉电压对，以及确定 来自交点电压对的样本和电导函数。

公开(公告)号：US20040140797A1

公开(公告)日：2004-07-22

申请号：US10685210

申请日：2003-10-14

申请人： Applied Materials, Inc.

发明人： Lawrence C. Lei ,  Siqing Lu ,  Yu Chang ,  Cecilia Martner ,  Quyen Pham ,  Yu Ping Gu ,  Joel Huston ,  Paul Smith ,  Gabriel Lorimer Miller

IPC分类号： G01B007/06 ,  G01N027/72

CPC分类号： G01B7/105

摘要： A method and apparatus are provided for measuring the thickness of a test object. The apparatus includes an eddy current sensor having first and second sensor heads. The sensor heads are positioned to have a predetermined gap therebetween for passage by at least a portion of the test object through the gap. The sensor heads make measurements at given sampling locations on the test object as the test object is moved through the gap. The apparatus also includes a position sensing mechanism to determine positions of the sampling locations on the test object. The apparatus also includes an evaluation circuit in communication with the eddy current sensor and to the position sensing mechanism for determining the thickness of the test object at the sampling locations.

摘要翻译： 提供了一种用于测量被测物体的厚度的方法和装置。 该装置包括具有第一和第二传感器头的涡流传感器。 传感器头被定位成在其间具有预定的间隙，以通过该测试对象的至少一部分通过间隙。 当测试对象移动穿过间隙时，传感器头在测试对象上的给定采样位置进行测量。 该装置还包括位置检测机构，用于确定测试对象上的采样位置的位置。 该装置还包括与涡流传感器和位置感测机构通信的评估电路，用于确定采样位置处的测试对象的厚度。

公开(公告)号：US20040119470A1

公开(公告)日：2004-06-24

申请号：US10651838

申请日：2003-08-29

申请人： SANKYO SEIKI MFG. CO., LTD.

发明人： Masao Yajima ,  Shogo Momose

IPC分类号： G01R033/02 ,  G01N027/72

CPC分类号： G01V3/105

摘要： A winding type magnetic sensor device includes a sensor core facing an object to be detected, an excitation coil wound around the sensor core, and a detection coil wound around the sensor core that defects a variation of magnetic flux corresponding to the object to obtain a detection signal for the object. A constant current drive circuit is provided that supplies a constant current to the excitation coil.

摘要翻译： 卷绕型磁传感器装置包括面向被检测体的传感器芯，缠绕在传感器芯上的励磁线圈，以及缠绕在传感器芯上的检测线圈，其对与该物体对应的磁通量的变化进行缺陷以获得检测 信号为对象。 提供恒定电流驱动电路，其向励磁线圈提供恒定电流。

公开(公告)号：US20040041560A1

公开(公告)日：2004-03-04

申请号：US10229696

申请日：2002-08-28

申请人： Scan Systems Corp.

发明人： William T. Walters ,  Danny J. Uselton ,  Robert W. Speiser

IPC分类号： G01N027/82 ,  G01N027/72

CPC分类号： G01N27/82

摘要： A device and method is taught for detection of flaws and localized wall loss in pipes made of ferromagnetic-based material. The device utilizes a magnetic field generator to create a horizontal magnetic field of flux. A pipe is passed through the magnetic field where a magnetic fluctuation detector, for example multiple groups of hall units, identifies fluctuations in the magnetic field.

摘要翻译： 教导了一种用于检测由铁磁性材料制成的管道中的缺陷和局部壁损失的装置和方法。 该装置利用磁场发生器产生磁通的水平磁场。 管道通过磁场，其中磁性波动检测器（例如多组霍尔单元）识别磁场中的波动。

公开(公告)号：US20030201769A1

公开(公告)日：2003-10-30

申请号：US10446367

申请日：2003-05-27

申请人： Applied Materials, Inc.

发明人： Hiroji Hanawa ,  Nils Johansson ,  Boguslaw Swedek ,  Manoocher Birang

IPC分类号： G01B007/06 ,  G01N027/72

CPC分类号： B24B37/013 ,  B24B37/205 ,  B24B49/02 ,  B24B49/105 ,  B24B49/12 ,  G01B7/105

摘要： A sensor for monitoring a conductive film in a substrate during chemical mechanical polishing generates an alternating magnetic field that impinges a substrate and induces eddy currents. The sensor can have a core, a first coil wound around a first portion of the core and a second coil wound around a second portion of the core. The sensor can be positioned on a side of the polishing surface opposite the substrate. The sensor can detect a phase difference between a drive signal and a measured signal.

摘要翻译： 用于在化学机械抛光期间监测衬底中的导电膜的传感器产生撞击衬底并引起涡流的交变磁场。 传感器可以具有芯，围绕芯的第一部分缠绕的第一线圈和缠绕在芯的第二部分上的第二线圈。 传感器可以位于与衬底相对的抛光表面的一侧。 传感器可以检测到驱动信号和测量信号之间的相位差。

公开(公告)号：US20020175679A1

公开(公告)日：2002-11-28

申请号：US09996083

申请日：2001-11-28

发明人： Hoon Kim ,  Yasushi Nagamune ,  Geun-Taek Lee ,  Suk-Hwan Chung

IPC分类号： G01N027/72 ,  G01R033/12

CPC分类号： G01R33/1253

摘要： Disclosed are apparatus and method for measuring Hall effect related-values in a semiconductor, such as a mobility, a carrier concentration and a resistivity using a Hall effect. A sample is loaded into an IC socket or a similar target, which is fixed on the inside of a heat insulating material container capable of containing injected liquid nitrogen. The Hall effect related-values are measured using a moving member for moving a pair of permanent magnets to an outside of the heat insulating material container. The measuring equipment has a simple structure, and a measuring operation is simple. A level of an input voltage of a sample is measured depending on a constant current that is supplied by a constant current supplying unit contained in a Hall voltage measurement unit. A measurement error detection unit detects and displays a measurement error of the sample using the level of the measured input voltage. Since the measurement error is detected before measuring the Hall effect, the measurement error can be excluded.

摘要翻译： 公开了使用霍尔效应来测量半导体中的霍尔效应相关值的装置和方法，例如迁移率，载流子浓度和电阻率。 将样品加载到IC插座或类似的目标物中，固定在能够容纳注入的液氮的绝热材料容器的内部。 使用用于将一对永磁体移动到绝热材料容器的外部的移动构件来测量霍尔效应相关值。 测量设备结构简单，测量操作简单。 取决于由包含在霍尔电压测量单元中的恒定电流供给单元提供的恒定电流来测量样本的输入电压的电平。 测量误差检测单元使用测量的输入电压的电平检测并显示样品的测量误差。 由于在测量霍尔效应之前检测到测量误差，因此可以排除测量误差。

公开(公告)号：US20020163330A1

公开(公告)日：2002-11-07

申请号：US10084918

申请日：2002-03-01

申请人： Honda Giken Kogyo Kabushiki Kaisha

发明人： Shigenobu Sekiya

IPC分类号： G01N027/72 ,  G01R033/12

CPC分类号： G01R33/028

摘要： A magnetic flux detector comprises a core member 12 and an armature member 11, and the core member 12 generates a magnetic flux by an exciting coil 13 when the exciting coil receives an excitation current controlled by an excitation current controller 30. The magnetic flux detector further comprises a search coil 14, which is provided in a magnetic path for the magnetic flux, and a magnetic flux calculator 40, which determines the magnitude of the magnetic flux by measuring an electromotive force induced in the search coil 14 by a change in the magnetic flux. The excitation current controller 30 controls the excitation current to increase from zero to a predetermined current value during a first predetermined time period T1 and then to decrease from the predetermined current value to zero during a second predetermined time period T2, and the magnetic flux calculator 40 determines the magnitude of the magnetic flux based on the difference between the increasing electromotive force integral value which is calculated by integrating the electromotive force induced in said search coil 14 during the first predetermined time period T1 and the decreasing electromotive force integral value which is calculated by integrating the electromotive force induced in the search coil 14 during the second predetermined time period T2.

摘要翻译： 磁通检测器包括铁芯构件12和电枢构件11，并且当励磁线圈接收到由励磁电流控制器30控制的励磁电流时，铁芯构件12通过励磁线圈13产生磁通。磁通检测器进一步 包括设置在用于磁通的磁路中的搜索线圈14和磁通量计算器40，该磁通量计算器40通过测量由磁场中的变化在搜索线圈14中感应的电动势来确定磁通量的大小 助焊剂 激励电流控制器30在第一预定时间段T1期间控制励磁电流从零增加到预定电流值，然后在第二预定时间段T2期间从预定电流值减小到零，并且磁通量计算器40 基于通过积分在第一预定时间段T1期间在所述搜索线圈14中感应的电动势计算出的增加电动势积分值与由下式计算的减小电动势积分值之间的差来确定磁通量的大小，该减小电动势积分值由 在第二预定时间段T2期间积分在搜索线圈14中感应的电动势。

公开(公告)号：US20020121895A1

公开(公告)日：2002-09-05

申请号：US10034447

申请日：2001-12-27

发明人： Felix Matveevich Mednikov ,  Stanislav Felixovich Mednikov ,  Mark Lazarevich Nechaevsky

IPC分类号： G01N027/72 ,  G01R033/00

CPC分类号： G01D5/2225

摘要： The invention relates to measurement technology and can find application for nondestructive testing electrically conducting and/or ferromagnetic materials and products. The differential eddy-current transducer comprises a primary detector (1) which incorporates two similar search coils (2, 3) and an additional coil (4) having its leads connected in series aiding to respective first leads of the search coils (2, 3) to second leads of which voltage is applied in antiphase. The transducer further comprises an electronic unit (5) which is electrically connected to the primary detector (1) and incorporates a potentiometer (6), a capacitive element (7), and an operational amplifier (8). Two leads of the potentiometer (6) are connected to common connection points of the leads of the search coils (2, 3), and its midpoint lead is connected to the capacitive element (7) which in turn is connected to the inverting input of the operational amplifier (8) whose noninverting input is grounded. The output of the operational amplifier (8) serves as the output of the electronic unit (5). The eddy-current transducer is capable of enhancing the measurement accuracy due to compensating for temperature errors, increasing the resolution and noise immunity thereof.

摘要翻译： 本发明涉及测量技术，并且可以应用于非导电和/或铁磁材料和产品的非破坏性测试。 差分涡流传感器包括主检测器（1），其包含两个类似的搜索线圈（2,3）和附加线圈（4），其引线连接到搜索线圈（2,3）的相应的第一引线 ）到反相电压施加的第二引线。 换能器还包括电连接到主检测器（1）并且包括电位计（6），电容元件（7）和运算放大器（8）的电子单元（5）。 电位计（6）的两个引线连接到搜索线圈（2,3）的引线的公共连接点，并且其中点引线连接到电容元件（7），该电容元件又连接到 其反相输入接地的运算放大器（8）。 运算放大器（8）的输出用作电子单元（5）的输出。 涡流传感器能够通过补偿温度误差来提高测量精度，从而提高其分辨率和抗噪声能力。

公开(公告)号：US20020024337A1

公开(公告)日：2002-02-28

申请号：US09940212

申请日：2001-08-28

发明人： Gerald C. LeVert ,  Francis E. LeVert

IPC分类号： G01N027/72 ,  G01R033/12

CPC分类号： G01N27/725 ,  G01R33/12

摘要： A Barkhausen probe comprising a magnetizing field generator, a magnetoresistive magnetic field sensor, a direct current power supply for biasing the magnetoresistive magnetic field sensor and signal conditioning electronics is described. The Barkhausen probe being capable of generating and sensing the Barkhausen noise emanating from the surface of a cyclic magnetized specimen. The conditioned Barkhausen noise output of the signal conditioning electronics being usable as input to various analysis systems where textural analysis of the material can be performed.

摘要翻译： 描述了一种包括磁场发生器，磁阻磁场传感器，用于偏置磁阻磁场传感器和信号调节电子装置的直流电源的巴克豪森探针。 巴克豪森探测器能够产生和感测从循环磁化样品表面发出的巴克豪森噪声。 信号调理电子设备的条件巴克豪森噪声输出可用作各种分析系统的输入，可以对材料进行纹理分析。