Invention Application
US20020181838A1 Optical MEMS device and package having a light-transmissive opening or window
审中-公开
光学MEMS器件和封装具有透光的开口或窗口
- Patent Title: Optical MEMS device and package having a light-transmissive opening or window
- Patent Title (中): 光学MEMS器件和封装具有透光的开口或窗口
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Application No.: US10025180Application Date: 2001-12-19
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Publication No.: US20020181838A1Publication Date: 2002-12-05
- Inventor: Shawn Jay Cunningham , Dana Richard DeReus , Victor Ramsey
- Main IPC: G02B006/35
- IPC: G02B006/35

Abstract:
An optical MEMS device and a package include an optical through path for allowing light to pass from a first side of the package, through a substrate on which the optical MEMS device is mounted and through a second side of the package opposite the first side. The package can include first and second light-transmissive portions or apertures for allowing the light to pass. The optical MEMS device can be a shutter for selectively affecting the flow of light through the package. A plurality of optical MEMS devices may be located within a single package because the optical paths for the MEMS devices can be substantially parallel to each other.
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