Invention Application
US20020181838A1 Optical MEMS device and package having a light-transmissive opening or window 审中-公开
光学MEMS器件和封装具有透光的开口或窗口

  • Patent Title: Optical MEMS device and package having a light-transmissive opening or window
  • Patent Title (中): 光学MEMS器件和封装具有透光的开口或窗口
  • Application No.: US10025180
    Application Date: 2001-12-19
  • Publication No.: US20020181838A1
    Publication Date: 2002-12-05
  • Inventor: Shawn Jay CunninghamDana Richard DeReusVictor Ramsey
  • Main IPC: G02B006/35
  • IPC: G02B006/35
Optical MEMS device and package having a light-transmissive opening or window
Abstract:
An optical MEMS device and a package include an optical through path for allowing light to pass from a first side of the package, through a substrate on which the optical MEMS device is mounted and through a second side of the package opposite the first side. The package can include first and second light-transmissive portions or apertures for allowing the light to pass. The optical MEMS device can be a shutter for selectively affecting the flow of light through the package. A plurality of optical MEMS devices may be located within a single package because the optical paths for the MEMS devices can be substantially parallel to each other.
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