发明申请
US20020182036A1 Semiconductor wafer handling robot for linear transfer chamber
审中-公开
用于线性传输室的半导体晶片处理机器人
- 专利标题： Semiconductor wafer handling robot for linear transfer chamber
- 专利标题（中）： 用于线性传输室的半导体晶片处理机器人
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申请号： US09874169申请日： 2001-06-04
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公开(公告)号： US20020182036A1公开(公告)日： 2002-12-05
- 发明人: Robert B. Lowrance
- 申请人： Applied Materials, Inc.
- 申请人地址： null
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： null
- 主分类号： B65G049/07
- IPC分类号： B65G049/07
摘要：
A wafer-handling robot is installed in a linear transfer chamber. The robot includes two cars mounted to travel along a linear guide. A first arm is pivotally mounted on the first car and a second arm is pivotally mounted on the second car. A robot wrist is pivotally mounted on outer ends of the two arms. When the cars are driven toward each other, the robot wrist is extended away from the linear guide. When the cars are driven away from each other, the robot wrist is retracted toward the linear guide.
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