Invention Application
- Patent Title: Method of manufacturing a bipolar transistor of double-polysilicon, heterojunction-base type and corresponding transistor
- Patent Title (中): 制造双晶硅,异质结基极型和相应晶体管的双极晶体管的方法
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Application No.: US10097651Application Date: 2002-03-13
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Publication No.: US20020185657A1Publication Date: 2002-12-12
- Inventor: Alain Chantre , Helene Baudry , Didier Dutartre
- Applicant: STMICROELECTRONICS S.A.
- Applicant Address: FR MONTROUGE
- Assignee: STMICROELECTRONICS S.A.
- Current Assignee: STMICROELECTRONICS S.A.
- Current Assignee Address: FR MONTROUGE
- Priority: FR0103469 20010314
- Main IPC: H01L031/0328
- IPC: H01L031/0328

Abstract:
Transistor and method of manufacturing a bipolar transistor of the double-polysilicon, heterojunction-base type, in which a semiconducting layer with SiGe heterojunction is formed by non-selective epitaxy on an active region of a substrate and an insulating region surrounding the active region. At least one stop layer is formed on the semiconducting layer above a part of the active region. A layer of polysilicon and an upper insulating layer are formed on the semiconducting layer and on a part of the stop layer, leaving an emitter window free. An emitter region is formed by epitaxy in the emitter window, resting partially on the upper insulating layer and in contact with the semiconducting layer.
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