发明申请
- 专利标题： Coupled micromachined structure
- 专利标题（中）： 耦合微加工结构
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申请号： US09884560申请日： 2001-06-19
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公开(公告)号： US20020189353A1公开(公告)日： 2002-12-19
- 发明人: Gary R. Knowles , Mark W. Weber
- 主分类号： G01P003/44
- IPC分类号： G01P003/44 ; G01P015/08
摘要：
A suspended, coupled micromachined structure including two proof masses and multiple support arms configured to suspend the masses above a substrate and a coupling spring element having two ends. Each end of the coupling spring element may be attached to a proof mass at a point between the proof masses. The frequency response characteristics of the proof masses may be improved.
公开/授权文献
- US06722197B2 Coupled micromachined structure 公开/授权日：2004-04-20
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