公开(公告)号：US20040255672A1

公开(公告)日：2004-12-23

申请号：US10816719

申请日：2004-04-01

申请人： Honeywell International Inc.

发明人： Gary R. Knowles ,  Mark W. Weber

IPC分类号： G01P015/08

CPC分类号： G01C19/5719 ,  G01P2015/0814

摘要： A suspended, coupled micromachined structure including two proof masses and multiple support arms configured to suspend the masses above a substrate and a coupling spring element having two ends. Each end of the coupling spring element may be attached to a proof mass at a point between the proof masses. The frequency response characteristics of the proof masses may be improved.

公开(公告)号：US20040149036A1

公开(公告)日：2004-08-05

申请号：US10762810

申请日：2004-01-22

发明人： Eric Foxlin ,  Yury Altshuler

IPC分类号： G01B021/16 ,  G01S005/16 ,  G01P015/18 ,  G01P015/08 ,  G01B021/00

CPC分类号： G02B27/017 ,  A61B5/1113 ,  A61B2503/22 ,  A61B2562/0219 ,  A61B2562/046 ,  G01C21/16 ,  G01S5/163 ,  G02B2027/014 ,  G02B2027/0187

摘要： A system for tracking the motion of an object relative to a moving reference frame includes a first inertial sensor mounted on the tracked object; a second inertial sensor mounted on the moving reference frame; a third inertial sensor mounted on the moving reference frame and spaced apart from the second inertial sensor; and an element coupled to said first and second and third inertial sensors and configured to determine a position of the object relative to the moving reference frame based on the signals from the first and second and third inertial sensor.

摘要翻译： 用于跟踪物体相对于移动参考系的运动的系统包括安装在被跟踪物体上的第一惯性传感器; 安装在移动参考系上的第二惯性传感器; 第三惯性传感器安装在移动的参考框架上并与第二惯性传感器间隔开; 以及耦合到所述第一和第二和第三和第三惯性传感器并被配置为基于来自第一和第二和第三和第三惯性传感器的信号来确定物体相对于运动参考系的位置的元件。

公开(公告)号：US20040007067A1

公开(公告)日：2004-01-15

申请号：US10380592

申请日：2003-06-26

发明人： Marcus Meyer ,  Stefan Reck ,  Juergen Herp ,  Markus Kliffken ,  Dietmar Schaible ,  Stefan Kotthaus ,  Frank Moskob ,  Thomas Huck ,  Michael Soellner ,  Martin Hager

IPC分类号： G01P015/08

CPC分类号： G01D5/145 ,  B60R1/074 ,  E05F15/603 ,  F16H1/16 ,  F16H59/38 ,  G01P3/487 ,  H02K7/1166 ,  H02K11/215 ,  Y10T74/19684 ,  Y10T74/19828

摘要： Gearset-drive unit (10), in particular for use in motor vehicles, comprising a drive wheel (16) that meshes with a driven wheel (22), wherein a sensor wheel (26) with a position sensor (36) that interacts with a sensor (42) to detect speed meshes with the drive wheel (16) or the driven wheel (22).

摘要翻译： 特别是用于机动车辆的变速驱动单元（10）包括与从动轮（22）啮合的驱动轮（16），其中具有与位置传感器（36）相互作用的传感器轮（26） 用于检测与驱动轮（16）或从动轮（22）的速度啮合的传感器（42）。

公开(公告)号：US20030037614A1

公开(公告)日：2003-02-27

申请号：US10055210

申请日：2002-01-23

发明人： Clark T.-C. Nguyen ,  Mustafa U. Demirci

IPC分类号： G01P015/08

CPC分类号： G01P15/0802 ,  G01C19/5719

摘要： A method and system for measuring angular speed of an object uses a micromechanical filter apparatus and allows Q-multiplication in both drive and sense modes. The invention takes advantage of the constant amplitude region of a filter spectrum within a passband of the filter apparatus to sense with a constant scaling factor that is independent of frequency variations with the passband. Thus, the system has much less sensitivity to drive mode resonance frequency shifts due to temperature variations, fabrication non-idealities and aging. The system senses angular rate or speed at resonance, which results in a great improvement over conventional gyroscopes operated off-resonance.

摘要翻译： 用于测量物体的角速度的方法和系统使用微机械滤波器装置并且允许驱动和感测模式中的Q倍增。 本发明利用滤波器​​装置的通带内的滤波器频谱的恒定幅度区域来利用与通带无关的频率变化的恒定缩放因子进行感测。 因此，由于温度变化，制造非理想性和老化，系统对驱动模式共振频移的灵敏度要低得多。 该系统感应共振时的角速率或速度，这导致比传统陀螺仪操作的非共振的改进。

公开(公告)号：US20020174720A1

公开(公告)日：2002-11-28

申请号：US10124794

申请日：2002-04-17

发明人： Donato Cardarelli

IPC分类号： G01P015/08

CPC分类号： G01P15/14 ,  G01C19/56

摘要： This invention describes the addition of mechanical reference members (MRM) to MEMS gyroscopes and accelerometers in order to enable the measurement of their scale factor and bias characteristics. The measurements can be made prior to or during operation of the instruments. This approach is attractive since MEMS devices are subject to drift of these characteristics with time, with the environment and with application conditions. The mechanical reference members are used to provide a rotation rate reference for the gyroscopes and an acceleration reference for the accelerometers.

摘要翻译： 本发明描述了将机械参考构件（MRM）添加到MEMS陀螺仪和加速度计，以便能够测量它们的比例因子和偏置特性。 测量可以在仪器运行之前或期间进行。 这种方法是有吸引力的，因为MEMS器件随着时间的流逝随着环境和应用条件而经历漂移。 机械参考构件用于提供陀螺仪的旋转速度参考值和加速度计的加速度参考值。

公开(公告)号：US20020129651A1

公开(公告)日：2002-09-19

申请号：US09804871

申请日：2001-03-13

发明人： Roger F. Burlingame

IPC分类号： G01P003/44 ,  G01P015/08

CPC分类号： G01C19/42

摘要： A gyroscope having a rotor mounted onto a rotating shaft wherein the rotor has a circular flange extending from and perpendicular to one surface thereof. A suspension member having a flexible flange is affixed concentric with the rotating shaft and the rotor. A hysteresis synchronous electric drive motor is used for spinning the combined shaft with rotor. A light source is disposed on a stationary plate for emitting light perpendicular to a surface of the circular flange of the rotor. A light sensor is also disposed on the stationary plate and on a side of the circular flange opposite of the light source for producing an electrical signal as a function of the amount of light received. The light source and the light sensor are positioned such that only a portion of the light from the source strikes the sensor when the gyro is in a quiescent rotating state. However, when the rotor is tilted as a function of an angular force applied to the gyroscope, the amount of light received by the sensor varies thereby producing an electrical signal indicative of the angular force.

摘要翻译： 具有安装在旋转轴上的转子的陀螺仪，其中转子具有从其一个表面延伸并垂直于其一个表面的圆形凸缘。 具有柔性凸缘的悬挂构件与旋转轴和转子同心地固定。 磁滞同步电动马达用于旋转组合轴与转子。 光源设置在固定板上，用于发射垂直于转子的圆形凸缘的表面的光。 光传感器还设置在固定板上并且在与光源相对的圆形凸缘的一侧上，以产生作为所接收的光量的函数的电信号。 光源和光传感器被定位成使得当陀螺仪处于静止旋转状态时，来自源的光的一部分撞击传感器。 然而，当转子作为施加到陀螺仪的角度力的函数而倾斜时，由传感器接收的光量变化，从而产生指示角力的电信号。

公开(公告)号：US20040211256A1

公开(公告)日：2004-10-28

申请号：US10462541

申请日：2003-06-16

申请人： ANALOG DEVICES, INC.

发明人： John A. Geen

IPC分类号： G01P015/08

CPC分类号： G01P15/18 ,  G01C19/5719 ,  G01P15/125 ,  G01P2015/082

摘要： A micro-machined multi-sensor that provides 2-axes of acceleration sensing and 1-axis of angular rate sensing. The multi-sensor includes a rigid accelerometer frame, a first proof mass, and a second proof mass. The substrate has two associated acceleration axes in the plane of the substrate, and one associated rotation axis perpendicular to the acceleration axes. The proof masses have a common vibration axis, which is perpendicular to the rotation axis. The multi-sensor further includes a drive electrode structure for causing the proof masses to vibrate in antiphase, a first pair of acceleration sense electrode structures disposed along one of the acceleration axes, and a second pair of acceleration sense electrode structures disposed along the other acceleration axis. The multi-sensor adds the sense signals provided by the respective sense electrode pairs to extract information pertaining to acceleration sensing along the acceleration axes, and adds the differences of the sense signals provided by the respective sense electrode pairs to extract information pertaining to angular rate sensing relative to the rotation axis.

摘要翻译： 一个微加工的多传感器，提供加速度感测的2轴和角速度感测的1轴。 多传感器包括刚性加速度计框架，第一检测质量块和第二检测质量块。 衬底在衬底的平面中具有两个相关联的加速轴，以及垂直于加速轴的一个相关联的旋转轴。 检测质量具有与旋转轴垂直的共同振动轴。 多传感器还包括用于使检体质量反相振动的驱动电极结构，沿着一个加速轴设置的第一对加速感测电极结构以及沿着另一加速度设置的第二对加速感测电极结构 轴。 多传感器增加由相应感测电极对提供的感测信号以提取与加速度轴相关的加速度感测的信息，并且将由各感测电极对提供的感测信号的差相加以提取与角速率感测有关的信息 相对于旋转轴。

公开(公告)号：US20030101815A1

公开(公告)日：2003-06-05

申请号：US10257989

申请日：2002-10-30

发明人： Elisabeth Orsier

IPC分类号： G01P015/08

CPC分类号： G01C19/574

摘要： A vibrating structure, including at least two oscillators (1, 2) vibrating in a direction of oscillation (XOX) included in a plane (XOX-YOY), a rigid support (8, 9, 10, 11) of the oscillators and oscillator coupling means able to couple their vibratory movements, these means being connected, on the one hand to the rigid support and on the other hand to the oscillators, each oscillator comprising at least one mass (3) and at least one flexible arm connecting the mass to the coupling means, characterised in that said coupling means. comprise flexible attachment means (19, 20) associated with at least one flexible arm (4) of each oscillator by at least one point of attachment, making at said point of attachment a pivot.

摘要翻译： 一种振动结构，包括在包括在平面（XOX-YOY）中的振荡方向（XOX）上振动的至少两个振荡器（1,2），振荡器和振荡器的刚性支撑件（8,9,10,11） 耦合装置能够耦合其振动运动，这些装置一方面连接到刚性支撑件，另一方面连接到振荡器，每个振荡器包括至少一个质量块（3）和至少一个柔性臂 耦合装置，其特征在于，所述耦合装置。 包括通过至少一个连接点与每个振荡器的至少一个柔性臂（4）相关联的柔性附接装置（19,20），在所述连接点处形成枢轴。

公开(公告)号：US20030066350A1

公开(公告)日：2003-04-10

申请号：US10126750

申请日：2002-04-22

申请人： Fujitsu Limited

发明人： Atsushi Machida ,  Suguru Warashina ,  Hiroshi Ishikawa ,  Tsutomu Miyashita ,  Yoshio Satoh

IPC分类号： G01P015/08

CPC分类号： G01C19/5607

摘要： An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support, two first arms and two second arms. These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator.

摘要翻译： 提供了一种角速度传感器，其包括将振荡器连接到框架的框架，振荡器和扭杆。 通过在基板的厚度方向上蚀刻材料基板，将框架，振荡器和扭杆形成为一体。 以H形式构成的振荡器包括支撑件，两个第一臂和两个第二臂。 这些臂从支撑件沿与基板的厚度方向垂直的臂延伸方向延伸。 振荡器包括安装表面，该安装表面设置有用于产生振荡器的平面内振荡的压电驱动器，以及用于检测振荡器的平面外振荡的压电检测器。

公开(公告)号：US20020189353A1

公开(公告)日：2002-12-19

申请号：US09884560

申请日：2001-06-19

发明人： Gary R. Knowles ,  Mark W. Weber

IPC分类号： G01P003/44 ,  G01P015/08

CPC分类号： G01C19/5719 ,  G01P2015/0814

摘要： A suspended, coupled micromachined structure including two proof masses and multiple support arms configured to suspend the masses above a substrate and a coupling spring element having two ends. Each end of the coupling spring element may be attached to a proof mass at a point between the proof masses. The frequency response characteristics of the proof masses may be improved.

摘要翻译： 一种悬浮的耦合微加工结构，包括两个检验质量块和多个支撑臂，所述多个支撑臂被配置为将基体悬挂在基底上方，以及具有两端的耦合弹簧元件。 联接弹簧元件的每个端部可以在检验质量块之间的点附接到检验质量块。 可以提高防爆质量的频率响应特性。