Invention Application
US20030007262A1 Micromirror unit with torsion connector having nonconstant width
有权
具有扭曲连接器的微镜单元具有不恒定的宽度
- Patent Title: Micromirror unit with torsion connector having nonconstant width
- Patent Title (中): 具有扭曲连接器的微镜单元具有不恒定的宽度
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Application No.: US09984814Application Date: 2001-10-31
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Publication No.: US20030007262A1Publication Date: 2003-01-09
- Inventor: Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Hisao Okuda
- Applicant: Fujitsu Limited
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Priority: JP2001-203152 20010704
- Main IPC: G02B026/08
- IPC: G02B026/08 ; G02F001/29 ; G02B005/08 ; G02B007/188

Abstract:
A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.
Public/Granted literature
- US06795225B2 Micromirror unit with torsion connector having nonconstant width Public/Granted day:2004-09-21
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