Invention Application
US20030010915A1 Emission electron microscope 失效
发射电子显微镜

  • Patent Title: Emission electron microscope
  • Patent Title (中): 发射电子显微镜
  • Application No.: US10204643
    Application Date: 2002-08-20
  • Publication No.: US20030010915A1
    Publication Date: 2003-01-16
  • Inventor: Krzysztof Grzelakowski
  • Priority: PLP.338538 20000220
  • Main IPC: H01J037/285
  • IPC: H01J037/285
Emission electron microscope
Abstract:
The invention relates to an emission electron microscope, comprising an objective lens, an imaging system with at least one lens and a stigmator. The invention is characterized in that said microscope comprises a second, independent imaging system (K2), parallel to the first imaging system (K1) and two electron detector devices (25) and (27), by means of which two independent images are recorded: a real image and an image of the angle distribution of the electrons as a result of electronically switching the potentials of the deflector elements (13) and (17). Both identical deflector elements comprise pairs of spherical and concentric electrodes and are electron-optically separated from each other (13a), (13b) and (17a), (17b) by double the focal length thereof and turn the electron beam through an angle corresponding to (null) and (nullnull), which leads to a parallel shift of the electron beam. The electrode (13b) contains a passage (13c), which allows the electron drift along the electron-optical main axis (29a), whilst the deflection is switched off. Said emission electron microscope also comprises an electron source (8), arranged close to the electron-optical axis (29) of the objective lens, which emits primary electrons along the electron-optical axis (28) at an angle (null) to the electron-optical axis (29) of the objective lens, a contrast diaphragm system (4a) in a plane correlated to the focal plane of the objective and an image diaphragm system (11), in one of the image planes of the system.
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