发明申请
- 专利标题: Semiconductor component and method for producing the same
- 专利标题(中): 半导体元件及其制造方法
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申请号: US10237106申请日: 2002-09-09
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公开(公告)号: US20030020135A1公开(公告)日: 2003-01-30
- 发明人: Nando Kaminski , Raban Held
- 申请人: DaimlerChrysler AG
- 申请人地址: DE Stuttgart
- 专利权人: DaimlerChrysler AG
- 当前专利权人: DaimlerChrysler AG
- 当前专利权人地址: DE Stuttgart
- 优先权: DE19723176.4 19970603
- 主分类号: H01L027/095
- IPC分类号: H01L027/095
摘要:
A method for producing a semiconductor component with adjacent Schottky (5) and pn (9) junctions positions in a drift area (2, 10) of a semiconductor material. According to the method, a silicon carbide substrate doped with a first doping material of at least 1018 cmnull3 is provided, and a silicon carbide layer with a second doping material of the same charge carrier type in the range of 1014 and 1017 cmnull3 is homo-epitaxially deposited on the substrate. A third doping material with a complimentary charge carrier is inserted, and structured with the aid of a diffusion and/or ion implantation, on the silicon carbide layer surface that is arranged far from the substrate to form pn junctions. Subsequently the component is subjected to a first temperature treatment between 1400null C. and 1700null C. Following this temperature treatment, a first metal coating is deposited on the implanted surface in order to form a Schottky contact and then a second metal coating is deposited in order to form an ohmic contact. Subsequently the first and second metal coatings are structured as designed.
公开/授权文献
- US06949401B2 Semiconductor component and method for producing the same 公开/授权日:2005-09-27
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