- 专利标题: Combination horizontal and vertical thermal actuator
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申请号: US10263117申请日: 2002-10-02
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公开(公告)号: US20030038703A1公开(公告)日: 2003-02-27
- 发明人: Billy L. Weaver , Douglas P. Goetz , Kathy L. Hagen , Mike E. Hamerly , Robert G. Smith , Silva K. Theiss
- 申请人: 3M Innovative Properties Company
- 申请人地址: null
- 专利权人: 3M Innovative Properties Company
- 当前专利权人: 3M Innovative Properties Company
- 当前专利权人地址: null
- 主分类号: H01H037/52
- IPC分类号: H01H037/52
摘要:
A micrometer sized, single-stage, horizontal and vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The horizontal and vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above and laterally offset from the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator exhibits horizontal and vertical displacement when current is applied to at least the hot arm.
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