发明申请
US20030113661A1 Chemical amplification type positive resist composition 有权
化学放大型正光刻胶组合物

  • 专利标题: Chemical amplification type positive resist composition
  • 专利标题(中): 化学放大型正光刻胶组合物
  • 申请号: US10239896
    申请日: 2002-09-26
  • 公开(公告)号: US20030113661A1
    公开(公告)日: 2003-06-19
  • 发明人: Yasunori UetaniTakakiyo TerakawaKaoru Araki
  • 优先权: JP2000-0088788 20000328
  • 主分类号: G03F007/038
  • IPC分类号: G03F007/038
Chemical amplification type positive resist composition
摘要:
A chemical amplification type positive resist composition is provided, comprising a resin which has at least one polymerization unit selected from a polymerization unit of 3-hydroxy-1-adamantyl acrylate and a polymerization unit of 3,5-dihydroxy-1-adamantyl (meth)acrylate, a polymerization unit of hydroxystyrene and a polymerization unit having a group uhstable to an acid, is itself insoluble or poorly soluble in an alkali but becomes alkali-soluble after said group unstable to an acid is dissociated by the action of an acid; and an acid generator, the composition being excellent in various abilities such as sensitivity, resolution, heat resistance, film retention ratio, applicability, exposure clearance, dry etching resistance and the like, particularly having further improved resolution and exposure clearance.
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