发明申请
- 专利标题: PHOTORESIST STRIPPER COMPOSITIONS
- 专利标题(中): 光电剥离器组合物
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申请号: US10116030申请日: 2002-04-05
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公开(公告)号: US20030113673A1公开(公告)日: 2003-06-19
- 发明人: Seung-Hyun Ahn , Sang-Mun Chon , Hoe-Sik Chung , Mi-Sook Jeon , Eun-Mi Bae , Baik-Soon Choi , Ok-Seok Jang
- 优先权: KR2001-79490 20011214; KR2002-13631 20020313
- 主分类号: G03F007/42
- IPC分类号: G03F007/42
摘要:
A photoresist stripper composition is made up of a mixture of an acetic acid ester, null-butyrolactone (GBL), and a non-acetate ester or a poly alkyl alcohol derivative. The acetic acid ester may be at least one of n-butyl acetate, amyl acetate, ethyl aceto-acetate, and isopropyl acetate. The non-acetate ester may be at least one of ethyl lactate (EL), ethyl-3-ethoxy propionate (EEP) and methyl-3-methoxy (MMP). The poly alkyl alcohol derivative may be at least one of propylene glycol monomethyl ester (PGME) and propylene glycol monomethyl ester acetate (PGMEA).
公开/授权文献
- US06589719B1 Photoresist stripper compositions 公开/授权日:2003-07-08
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