发明申请
US20030113673A1 PHOTORESIST STRIPPER COMPOSITIONS 失效
光电剥离器组合物

PHOTORESIST STRIPPER COMPOSITIONS
摘要:
A photoresist stripper composition is made up of a mixture of an acetic acid ester, null-butyrolactone (GBL), and a non-acetate ester or a poly alkyl alcohol derivative. The acetic acid ester may be at least one of n-butyl acetate, amyl acetate, ethyl aceto-acetate, and isopropyl acetate. The non-acetate ester may be at least one of ethyl lactate (EL), ethyl-3-ethoxy propionate (EEP) and methyl-3-methoxy (MMP). The poly alkyl alcohol derivative may be at least one of propylene glycol monomethyl ester (PGME) and propylene glycol monomethyl ester acetate (PGMEA).
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