Invention Application
- Patent Title: Integrated resistor, phase-change memory element including this resistor, and process for the fabrication thereof
- Patent Title (中): 集成电阻器,包括该电阻器的相变存储元件及其制造方法
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Application No.: US10345129Application Date: 2003-01-14
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Publication No.: US20030161195A1Publication Date: 2003-08-28
- Inventor: Romina Zonca , Maria Santina Marangon , Giorgio De Santi
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Priority: EP02425013.6 20020117
- Main IPC: G11C007/00
- IPC: G11C007/00

Abstract:
A vertical-current-flow resistive element includes a monolithic region having a first portion and a second portion arranged on top of one another and formed from a single material. The first portion has a first resistivity, and the second portion has a second resistivity, lower than the first resistivity. To this aim, a monolithic region with a uniform resistivity and a height greater than at least one of the other dimensions is first formed; then the resistivity of the first portion is increased by introducing, from the top, species that form a prevalently covalent bond with the conductive material of the monolithic region, so that the concentration of said species becomes higher in the first portion than in the second portion. Preferably, the conductive material is a binary or ternary alloy, chosen from among TiAl, TiSi, TiSi2, Ta, WSi, and the increase in resistivity is obtained by nitridation.
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