Invention Application
- Patent Title: Rotation-type decoupled MEMS gyroscope
- Patent Title (中): 旋转型解耦MEMS陀螺仪
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Application No.: US10359272Application Date: 2003-02-06
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Publication No.: US20030164041A1Publication Date: 2003-09-04
- Inventor: Hee-moon Jeong , Jun-o Kim , Byeung-leul Lee , Sang-woo Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: null
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: null
- Priority: KR2002-07244 20020208
- Main IPC: G01P009/00
- IPC: G01P009/00

Abstract:
A rotation-type decoupled MEMS gyroscope including a drive body movable about the X-axis, a sensing body movable about the Z-axis, a medium body moving together with the drive body about the X-axis and the sensing body about the Z-axis. The drive body is fixed on a substrate by a first torsion spring torsion-deformed about the X-axis, and the medium body is connected to the drive body by a first bending spring bending-deformed about the Z-axis. The sensing body is connected to the medium body by a second torsion spring torsion-deformed about the X-axis and fixed to the substrate by a second bending spring bending-deformed about the Z-axis. If angular velocity is applied relative to the Y-axis while the drive body vibrates in a certain range about the X-axis by a driving electrode, the sensing body rotates about the Z-axis by the Coriolis force and a sensing electrode senses the rotation.
Public/Granted literature
- US06796178B2 Rotation-type decoupled MEMS gyroscope Public/Granted day:2004-09-28
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