公开(公告)号：US20030164041A1

公开(公告)日：2003-09-04

申请号：US10359272

申请日：2003-02-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hee-moon Jeong ,  Jun-o Kim ,  Byeung-leul Lee ,  Sang-woo Lee

IPC: G01P009/00

CPC classification number: G01C19/5712

Abstract: A rotation-type decoupled MEMS gyroscope including a drive body movable about the X-axis, a sensing body movable about the Z-axis, a medium body moving together with the drive body about the X-axis and the sensing body about the Z-axis. The drive body is fixed on a substrate by a first torsion spring torsion-deformed about the X-axis, and the medium body is connected to the drive body by a first bending spring bending-deformed about the Z-axis. The sensing body is connected to the medium body by a second torsion spring torsion-deformed about the X-axis and fixed to the substrate by a second bending spring bending-deformed about the Z-axis. If angular velocity is applied relative to the Y-axis while the drive body vibrates in a certain range about the X-axis by a driving electrode, the sensing body rotates about the Z-axis by the Coriolis force and a sensing electrode senses the rotation.

Abstract translation: 旋转型解耦MEMS陀螺仪，其包括可围绕X轴移动的驱动体，围绕Z轴可移动的感测体，与驱动体一起围绕X轴移动的介质体和围绕Z轴的传感体， 轴。 驱动体通过围绕X轴扭转变形的第一扭转弹簧固定在基板上，并且介质体通过围绕Z轴弯曲变形的第一弯曲弹簧连接到驱动体。 感测体通过围绕X轴扭转变形的第二扭转弹簧连接到介质主体，并通过围绕Z轴弯曲变形的第二弯曲弹簧固定到基板。 如果驱动体通过驱动电极绕X轴在一定范围内振动，则相对于Y轴施加角速度，则感测体通过科里奥利力围绕Z轴旋转，感测电极感测旋转 。

公开(公告)号：US20030110858A1

公开(公告)日：2003-06-19

申请号：US10293502

申请日：2002-11-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jun-o Kim ,  Sang-woo Lee

IPC: G01P015/14

CPC classification number: G01C19/5762

Abstract: X type MEMS gyroscope has a first mass vertically vibrating on a substrate and a second mass horizontally vibrating on the substrate. A driving electrode is disposed on the same surface with the first mass. When the first mass vertically vibrates, the second mass vibrates vertically together with the first mass. When angular velocity that is at a right angle to a movement direction of the first mass and the second mass is applied while the first mass is vertically vibrating, the second mass moves as Coriolis force is added to the second mass in a horizontal direction, and a sensing electrode measures displacement of the second mass in the horizontal direction. All moving electrodes and stationary electrodes are disposed on the same surface, and all elements are manufactured by using one mask. Therefore, adhesion between the moving and stationary electrodes is prevented and the manufacturing process is simplified.

Abstract translation: X型MEMS陀螺仪具有在基板上垂直振动的第一质量和在基板上水平振动的第二质量。 驱动电极设置在与第一质量块相同的表面上。 当第一质量垂直振动时，第二质量与第一质量一起垂直振动。 当在第一质量垂直振动的同时施加与第一质量和第二质量块的运动方向成直角的角速度时，第二质量块移动，因为科里奥利力在水平方向上被添加到第二质量块，并且 感测电极测量第二质量块在水平方向上的位移。 所有移动电极和固定电极均设置在相同的表面上，所有元件均通过使用一个掩模制造。 因此，防止了移动和固定电极之间的粘附，并简化了制造工艺。

公开(公告)号：US20020158293A1

公开(公告)日：2002-10-31

申请号：US10121666

申请日：2002-04-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Byeung-leul Lee ,  Kyu-dong Jung ,  Sang-woo Lee ,  Yong-chul Cho

IPC: H01L027/14 ,  H01L029/82 ,  H01L029/84

CPC classification number: G01P15/18 ,  B81B2203/0136 ,  B81C1/0015 ,  B81C2201/0132 ,  G01C19/5755 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0831

Abstract: Provided are a structure for detecting a vertical displacement and its manufacturing method. The structure for detecting a vertical displacement includes a body, an inertial mass floated over the body, a plurality of support beams extending from the inertial mass so as to suspend the inertial mass over the body, movable electrodes integrally formed with the inertial mass, and fixed electrodes floated over the body, each being positioned between the neighboring movable electrodes, wherein a vertical length of the movable electrode is different from a vertical length of the fixed electrode. Therefore, the structure and the electrodes can be simultaneously manufactured, thereby making the fabrication process simple. Also, it is possible to manufacture a three-axis accelerometer and a three-axis gyroscope on a single wafer by the same process, to be integrated as a six-axis inertial sensor.

Abstract translation: 提供了用于检测垂直位移的结构及其制造方法。 用于检测垂直位移的结构包括主体，悬挂在主体上的惯性质量，从惯性块延伸的多个支撑梁，以将惯性块悬挂在主体上，与惯性块一体形成的可动电极，以及 固定电极浮在身体上，每个固定电极位于相邻的可移动电极之间，其中可移动电极的垂直长度不同于固定电极的垂直长度。 因此，可以同时制造结构和电极，从而使制造工艺简单。 另外，可以通过相同的工艺在单个晶片上制造三轴加速度计和三轴陀螺仪，作为六轴惯性传感器集成。