发明申请
- 专利标题： Aluminum nitride sintered body, ceramic substrate, ceramic heater and electrostatic chuck
- 专利标题（中）： 氮化铝烧结体，陶瓷基板，陶瓷加热器和静电吸盘
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申请号： US10442967申请日： 2003-05-22
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公开(公告)号： US20030203225A1公开(公告)日： 2003-10-30
- 发明人: Yasuji Hiramatsu , Yasutaka Ito
- 申请人： IBIDEN CO., LTD.
- 申请人地址： JP Gifu
- 专利权人： IBIDEN CO., LTD.
- 当前专利权人： IBIDEN CO., LTD.
- 当前专利权人地址： JP Gifu
- 优先权： JP2000-048262 20000224; JP2000-048338 20000224; JP2000-202826 20000704; JP2000-361768 20001128; JP2000-367541 20001201
- 主分类号： B32B009/00
- IPC分类号： B32B009/00
摘要：
The object of the present invention is to provide an aluminum nitride sintered body which has excellent mechanical strength and in which ceramic particles is prevented from coming off from the surface and/or side thereof and generation of free particles is suppressed. The aluminum nitride sintered body of the present invention is wherein it contains sulfur.
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