发明申请
- 专利标题: Optical ready wafers
- 专利标题(中): 光学准备好的晶圆
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申请号: US10280492申请日: 2002-10-25
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公开(公告)号: US20040012041A1公开(公告)日: 2004-01-22
- 发明人: Lawrence C. West , Claes Bjorkman , Dan Maydan , Samuel Broydo
- 申请人: Applied Materials, Inc.
- 申请人地址: null
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: null
- 主分类号: H01L021/00
- IPC分类号: H01L021/00
摘要:
An optical ready substrate made at least in part of a first semiconductor material and having a front side and a backside, the front side having a top surface that is of sufficient quality to permit microelectronic circuitry to be fabricated thereon using semiconductor fabrication processing techniques. The optical ready substrate includes an optical signal distribution circuit fabricated on the front side of the substrate in a first layer region beneath the top surface of the substrate. The optical signal distribution circuit is made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuitry to be fabricated thereon.
公开/授权文献
- US07043106B2 Optical ready wafers 公开/授权日:2006-05-09
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