发明申请
US20040043523A1 Long wavelength indium arsenide phosphide (InAsP) quantum well active region and method for producing same 失效
长波长磷化铟(InAsP)量子阱活性区及其制备方法

  • 专利标题: Long wavelength indium arsenide phosphide (InAsP) quantum well active region and method for producing same
  • 专利标题(中): 长波长磷化铟(InAsP)量子阱活性区及其制备方法
  • 申请号: US10230895
    申请日: 2002-08-29
  • 公开(公告)号: US20040043523A1
    公开(公告)日: 2004-03-04
  • 发明人: David P. BourMichael R.T. TanWilliam H. Perez
  • 主分类号: H01L021/28
  • IPC分类号: H01L021/28
Long wavelength indium arsenide phosphide (InAsP) quantum well active region and method for producing same
摘要:
An InAsP active region for a long wavelength light emitting device and a method for growing the same are disclosed. In one embodiment, the method comprises placing a substrate in an organometallic vapor phase epitaxy (OMVPE) reactor, the substrate for supporting growth of an indium arsenide phosphide (InAsP) film, forming a quantum well layer of InAsP, and forming a barrier layer adjacent the quantum well layer, where the quantum well layer and the barrier layer are formed at a temperature of less than 520 degrees C. Forming the quantum well layer and the barrier layer at a temperature of less than 520 degrees C. results in fewer dislocations by suppressing relaxation of the layers. A long wavelength active region including InAsP quantum well layers and InGaP barrier layers is also disclosed.
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