发明申请
US20040061930A1 Narrow-band spectral filter and the use thereof 失效
窄带光谱滤波器及其用途

  • 专利标题: Narrow-band spectral filter and the use thereof
  • 专利标题(中): 窄带光谱滤波器及其用途
  • 申请号: US10466961
    申请日: 2003-07-23
  • 公开(公告)号: US20040061930A1
    公开(公告)日: 2004-04-01
  • 发明人: Marco Wedowski
  • 优先权: DE10103738.4 20010126; DE10109242.3 20010226; DE10136620.5 20010719
  • 主分类号: G02B005/08
  • IPC分类号: G02B005/08 G02B005/20 F21V009/04 F21V009/06
Narrow-band spectral filter and the use thereof
摘要:
The invention relates to a narrow-band spectral filter. The aim of the invention is to reduce the radiation exposure of optical elements used in highly ultraviolet light by using an optical filter (10) that is simple in construction and that preselects a wavelength band of a predetermined bandwidth. To this end, an optical filter (10) is provided that comprises at least one zirconium, niobium, or molybdenum layer (1a, b) interposed between two silicon layers (2). In order to increase the mechanical stability and the service life of the filter and in order to further restrict the spectral characteristics, another two ruthenium or rhodium layers each can follow the silicon layers. The filters (10) of this kind are especially used in lighting systems and projection lighting systems for highly ultraviolet light that are used in semiconductor lithography.
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