公开(公告)号：US20040070820A1

公开(公告)日：2004-04-15

申请号：US10681261

申请日：2003-10-09

发明人： Takashi Nishimura

IPC分类号： B23K026/00 ,  G02B005/08 ,  G02B005/20 ,  F21V009/04 ,  F21V009/06

CPC分类号： G02B27/108 ,  B23K26/067 ,  B23K2101/007 ,  G02B5/04 ,  G02B27/144

摘要： A beam splitter is constructed from three light transmissive members formed of a glass or plastic that are bonded together to form a rectangular parallelepiped when taken as a whole. First and second light separating surfaces are formed at the bonding surfaces of the first and second light transmissive members and the bonding surfaces of the second and third light transmissive members, respectively. Accordingly, three light beams can easily be formed from a single beam of incident light.

摘要翻译： 分束器由三个由玻璃或塑料构成的透光构件构成，当透视为整体时，它们结合在一起形成长方体。 第一和第二光分离表面分别形成在第一和第二透光构件的接合表面和第二和第三透光构件的接合表面。 因此，可以容易地从单个入射光束形成三个光束。

公开(公告)号：US20040058253A1

公开(公告)日：2004-03-25

申请号：US10641114

申请日：2003-08-15

申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD

发明人： Masayuki Endo ,  Masaru Sasago

IPC分类号： G03F001/00 ,  G02B005/08 ,  G02B005/20 ,  F21V009/04 ,  F21V009/06 ,  G02B005/26 ,  G03F007/20 ,  G03F007/40 ,  C23C014/12 ,  C23C014/34 ,  G02B017/00 ,  G02B021/00 ,  G02B023/00 ,  G03B027/58 ,  G03B027/62 ,  G03B027/70

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G02B5/0891 ,  G03F1/24 ,  G03F1/48 ,  G03F7/70958 ,  G21K1/06

摘要： A mirror for use in an exposure system of this invention includes a reflection layer for reflecting EUV formed on a mirror substrate and an absorption layer formed on the reflection layer and made from a compound for absorbing infrared light.

摘要翻译： 用于本发明的曝光系统的反射镜包括用于反射形成在镜面基板上的EUV的反射层和形成在反射层上并由用于吸收红外光的化合物制成的吸收层。

公开(公告)号：US20040002009A1

公开(公告)日：2004-01-01

申请号：US10186053

申请日：2002-06-27

发明人： Pei-Yang Yan

IPC分类号： G03F001/08 ,  G02B005/08 ,  G02B005/20 ,  F21V009/04 ,  F21V009/06

CPC分类号： G02B5/0891 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/48 ,  G21K1/062 ,  G21K2201/067

摘要： An embodiment of the present invention includes an outer capping layer, a multilayer (ML) stack, and an inner capping layer. The outer capping layer is made of an outer material and has an outer thickness. The multilayer (ML) stack is below the outer capping layer. The inner capping layer is made of an inner material and has an inner thickness and is located between the ML stack and a ML reflector. The inner thickness is selected to enable constructive interference between the ML stack and the ML reflector.

公开(公告)号：US20040145803A1

公开(公告)日：2004-07-29

申请号：US10475653

申请日：2003-10-23

发明人： Frank Eisenkramer

IPC分类号： G02B005/08 ,  G02B005/20 ,  F21V009/04 ,  F21V009/06

CPC分类号： G02B21/06 ,  G02B1/115 ,  G02B21/0016 ,  G02B21/16

摘要： An inspection microscope for several wavelength ranges with at least one illuminating beam path and at least one imaging beam path is disclosed. Those optical elements in the illuminating beam path and in the imaging beam path, through which beams of all wavelengths pass, are provided with a reflection reducing layer, by means of which the wavelength ranges with reduced reflection are the visible VIS-wavelength range up to 650 nm, the i-lines at nullnull365 nm and the ultraviolet DUV-wavelength range from 240 nm to 270 nm. The reflection reducing layer is a sandwich structure, comprising various material combinations, such as for example, M2/MgF2 or M2/MgF2/SiO2 or M2/MgF2/Al203, where M2 is a mixed substance from the company Merck, comprising La2O3.3,3 Al203. The optical components with reduced reflectance preferably comprise quartz glass or CaF2.

摘要翻译： 公开了一种用于具有至少一个照明光束路径和至少一个成像光束路径的几个波长范围的检查显微镜。 所有波长通过的照明光束路径和成像光束路径中的那些光学元件设置有反射减少层，通过该反射减少层，减少反射的波长范围是可见的VIS波长范围，直到 650nm，λ= 365nm的i线和240nm至270nm的紫外DUV波长范围。 反射降低层是夹层结构，包括各种材料组合，例如M2 / MgF2或M2 / MgF2 / SiO2或M2 / MgF2 / Al2O3，其中M2是来自默克公司的混合物质，其包含La2O3.3 ，3 Al203。 具有降低的反射率的光学部件优选包括石英玻璃或CaF 2。

公开(公告)号：US20040053026A1

公开(公告)日：2004-03-18

申请号：US10657665

申请日：2003-09-08

发明人： Marie Angelopoulos ,  Katherina E. Babich ,  Cameron James Brooks ,  S. Jay Chey ,  C. Richard Guarnieri ,  Michael Straight Hibbs ,  Kenneth Christopher Racette

IPC分类号： B32B001/00 ,  B32B009/00 ,  B32B017/06 ,  B32B015/00 ,  B32B009/04 ,  G02B005/08 ,  G02B005/20 ,  F21V009/04 ,  F21V009/06 ,  C23C014/35 ,  C23C014/34 ,  C23C014/08 ,  H05H001/00 ,  H05H001/24 ,  G03F001/00

CPC分类号： G03F1/32 ,  C23C14/0641 ,  C23C14/0676 ,  C23C14/352 ,  G03F7/16 ,  Y10T428/265

摘要： An attenuating embedded phase shift photomask blank that produces a phase shift of the transmitted light is formed with an optically translucent film made of metal, silicon, nitrogen or metal, silicon, nitrogen and oxygen. A wide range of optical transmission (0.001% up to 20% at 193 nm) is obtained by this process. A post deposition process is implemented to obtain the desired properties (stability of optical properties with respect to laser irradiation and acid treatment) for use in industry. A special fabrication process for the sputter target is implemented to lower the defects of the film.

摘要翻译： 通过由金属，硅，氮或金属，硅，氮和氧制成的光学半透明的膜形成产生透射光的相移的衰减的嵌入式相移光掩模坯料。 通过该方法获得宽范围的光学透射（0.001nm至高达193nm的20％）。 实现后沉积工艺以获得在工业中使用的所需性能（相对于激光照射和酸处理的光学性质的稳定性）。 实现用于溅射靶的特殊制造工艺以降低膜的缺陷。

公开(公告)号：US20030086160A1

公开(公告)日：2003-05-08

申请号：US10319192

申请日：2002-12-13

申请人： THERMO CORION CORPORATION

发明人： Jamie Knapp

IPC分类号： G02B001/00 ,  G02B005/08 ,  G02B005/20 ,  F21V009/04 ,  F21V009/06

CPC分类号： G01J1/429 ,  C02F1/32 ,  C02F2201/326 ,  G01J1/0488 ,  G02B5/283

摘要： A novel, cost effective optical filter is employed for photosensors used in ultraviolet-based water purification systems. Optically tuned to specifically eliminate the non-germicidal wavelength polychromatic emissions from mercury lamps, this unique optical filter approach significantly reduces the cost in manufacturing reliable water purification systems employing ultraviolet light.

公开(公告)号：US20030047722A1

公开(公告)日：2003-03-13

申请号：US10181834

申请日：2002-07-19

发明人： Takanori Fujita ,  Katsuyoshi Tanaka ,  Toshiaki Takaoka

IPC分类号： G02B005/22 ,  G02B005/26 ,  F21V009/06 ,  F21V009/04

CPC分类号： G02B1/041 ,  C08F222/1006 ,  C08L33/14

摘要： Disclosed are optical materials which effectively absorb UV light up to the long wavelength band, have low specific gravity, and have balanced properties including impact and heat resistances; lenses; and optical material compositions as their starting materials. The composition contains a polymerizable monomer material consisting of at least one di(meth)acrylate of formula (1): 1 (R: CH3 etc., Ph: a phenylene group; x, z: an integer of 1 to 5; y: 0 or 1) and at least one monomer (M) having at least one vinyl group in one molecule other than monomers of formula (1), and an additive selected from component (A1), (A2), or (B), or mixtures thereof, provided that components (A1) and/or (B) is contained, and when component (B) is contained, components (A1) and/or (A2) is also contained: (A1): a chlorinated benzotriazole UV absorber; (A2): a chlorine-free benzotriazole UV absorber; (B): a coloring agent having absorption maximum in 520-650 nm.

摘要翻译： 公开了能够有效地吸收长达波长带的紫外线，具有低比重的光学材料，并具有包括冲击和耐热性在内的平衡性能; 镜片; 和光学材料组合物作为其起始材料。 该组合物包含由至少一种式（1）的二（甲基）丙烯酸酯组成的可聚合单体材料：（R：CH 3等，Ph：亚苯基; x，z：1至5的整数; y：0 或1）和至少一种在一个分子中具有至少一个乙烯基的单体（M），除了式（1）的单体和选自组分（A1），（A2）或（B）的混合物或混合物 其中含有组分（A1）和/或（B），并且当含有组分（B）时，还含有组分（A1）和/或（A2）：（A1）：氯化苯并三唑UV吸收剂; （A2）：无氯苯并三唑UV吸收剂; （B）：在520-650nm具有最大吸收的着色剂。

公开(公告)号：US20010003359A1

公开(公告)日：2001-06-14

申请号：US09769335

申请日：2001-01-26

发明人： Kyoko Izumi ,  Shusaku Nakano ,  Amane Mochizuki

IPC分类号： F21V009/04 ,  C09K019/34

CPC分类号： C07D493/04 ,  C08F20/26 ,  C08F20/30 ,  C09K19/3861 ,  C09K2019/3408 ,  G02B5/3016

摘要： To obtain a monomer having a large torsion force, to obtain a liquid crystal polymer which is excellent in a film-forming property, can easily control a helical pitch of a cholesteric phase, can form a grandjean orientation in a good monodomain state by an orientation treatment in a short time such as few minutes, and can stably fix it in a glass state, and to obtain an optical element having a circular dichroism, represented by the following formula (a), comprising a solidified product of the liquid crystal polymer, which is thin and light, is hard to change the oriented state such as pitch, etc., at a practical temperature, and has excellent durability and storage stability. An optically active monomer represented by 1 (wherein R1 represents a hydrogen atom or a methyl group, and A and B represent an organic group); a side chain type liquid crystal polymer having a structural unit comprising the optically active monomer; and an optical element showing a circular dichroism having a solidified layer of a grandjean oriented cholesteric liquid crystal phase comprising the liquid crystal polymer.

摘要翻译： 为了获得具有大扭矩的单体，为了获得成膜性优异的液晶聚合物，可以容易地控制胆甾型相的螺旋间距，可以通过取向形成具有良好单畴状态的超大方向 在几分钟内的短时间内进行处理，并且可以将其稳定地固定在玻璃状态，并且获得由下式（a）表示的具有圆二色性的光学元件，其包含液晶聚合物的固化产物， 薄而轻，难以在实际温度下改变定向状态如沥青等，并且具有优异的耐久性和储存稳定性。 由（其中R1表示氢原子或甲基，A和B表示有机基团）表示的光学活性单体; 具有包含光学活性单体的结构单元的侧链型液晶聚合物; 以及表示具有由液晶聚合物构成的具有盛大的取向胆固醇型液晶相的固化层的圆二色性的光学元件。

公开(公告)号：US20010002940A1

公开(公告)日：2001-06-07

申请号：US09340429

申请日：1999-06-28

发明人： BERNARD GLANCE

IPC分类号： G02B006/26 ,  G02B006/42 ,  G02B005/08 ,  G02B005/20 ,  F21V009/04 ,  F21V009/06

CPC分类号： G02B5/288 ,  G02B6/29367 ,  G02B6/29383 ,  G02B6/29395 ,  G02B26/007

摘要： An inexpensive and efficient tunable electromagnetic filter is disclosed, having a wide range of tunable frequencies, comprising a holder with a number of filters mounted on the holder. The frequency of the filter is altered by moving the holder relative to a beam striking the holder so that one of the filters is filtering the beam. The frequency to be filtered may be easily and quickly changed, without altering the structure of the filter. In one embodiment the tunable filter is a disk rotatable by a motor with a number of fixed frequency filters mounted around the periphery of the disk. The filter is surrounded by four fibers providing and receiving beams, as with known add-drop filters.

摘要翻译： 公开了一种廉价且高效的可调谐电磁滤波器，其具有宽范围的可调谐频率，包括具有安装在保持器上的多个滤波器的保持器。 通过使保持器相对于撞击保持器的光束移动使得滤波器中的一个滤波器来改变滤光器的频率。 要过滤的频率可以容易而快速地改变，而不改变过滤器的结构。 在一个实施例中，可调谐滤波器是可由具有多个固定频率滤波器的马达旋转的盘，围绕盘的周边安装。 滤波器由提供和接收波束的四个光纤包围，与已知的分插滤波器一样。

公开(公告)号：US20040061930A1

公开(公告)日：2004-04-01

申请号：US10466961

申请日：2003-07-23

发明人： Marco Wedowski

IPC分类号： G02B005/08 ,  G02B005/20 ,  F21V009/04 ,  F21V009/06

CPC分类号： G03F7/70958 ,  G03F7/70158 ,  G03F7/70191 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70575 ,  G21K1/10

摘要： The invention relates to a narrow-band spectral filter. The aim of the invention is to reduce the radiation exposure of optical elements used in highly ultraviolet light by using an optical filter (10) that is simple in construction and that preselects a wavelength band of a predetermined bandwidth. To this end, an optical filter (10) is provided that comprises at least one zirconium, niobium, or molybdenum layer (1a, b) interposed between two silicon layers (2). In order to increase the mechanical stability and the service life of the filter and in order to further restrict the spectral characteristics, another two ruthenium or rhodium layers each can follow the silicon layers. The filters (10) of this kind are especially used in lighting systems and projection lighting systems for highly ultraviolet light that are used in semiconductor lithography.

摘要翻译： 本发明涉及一种窄带光谱滤波器。 本发明的目的是通过使用结构简单的光学滤波器（10）来减少在高度紫外光中使用的光学元件的辐射暴露，并且预先选择预定带宽的波长带。 为此，提供一种光学滤波器（10），其包括插入在两个硅层（2）之间的至少一个锆，铌或钼层（1a，b）。 为了增加过滤器的机械稳定性和使用寿命，为了进一步限制光谱特性，另外两个钌或铑层可以跟随硅层。 这种滤光片（10）特别适用于用于半导体光刻的高度紫外光的照明系统和投影照明系统。