Invention Application
- Patent Title: Anti-reflective compositions comprising triazine compounds
- Patent Title (中): 包含三嗪化合物的抗反射组合物
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Application No.: US10271646Application Date: 2002-10-15
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Publication No.: US20040072420A1Publication Date: 2004-04-15
- Inventor: Tomoyuki Enomoto , Keisuke Nakayama , Rama Puligadda
- Applicant: Brewer Science, Inc
- Applicant Address: null
- Assignee: Brewer Science, Inc
- Current Assignee: Brewer Science, Inc
- Current Assignee Address: null
- Main IPC: H01L021/44
- IPC: H01L021/44

Abstract:
The present invention relates to an anti-reflective coating composition characterized by comprising a resin made from triazine compounds having at least two nitrogen atoms substituted a hydroxymethyl group and/or an alkoxymethyl group, and a light absorbing compound and/or a light absorbing resin. The present invention offers an anti-reflective coating composition for the anti-reflective coating having high light absorption property of the light used for the lithography process in the preparation of semiconductor device, showing high reflective light preventing effect, being used at thinner film thickness more than before, and having greater dry etching rate in comparison to photoresist layer.
Public/Granted literature
- US07038328B2 Anti-reflective compositions comprising triazine compounds Public/Granted day:2006-05-02
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