Invention Application
- Patent Title: Back side incident type image pickup sensor
- Patent Title (中): 背面事件型摄像传感器
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Application No.: US10673289Application Date: 2003-09-30
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Publication No.: US20040079865A1Publication Date: 2004-04-29
- Inventor: Junichi Hoshi
- Applicant: Canon Kabushiki Kaisha
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Priority: JP2002-296321 20021009
- Main IPC: H01L027/00
- IPC: H01L027/00 ; G01J001/00 ; G01T001/24

Abstract:
A back side incident type image pickup sensor in which lowering of spatial resolution is eliminated and influence of stray light is removed is provided. Electric circuits including a driver circuit for driving a photoelectric conversion portion and a signal processing circuit for processing signals from the photoelectric conversion portion are each placed on the front side of a single crystal silicon substrate at a given distance in the horizontal direction from an opening. Influence of stray light is thus eliminated. The semiconductor substrate has high refractive index, thereby essentially allowing little lowering of spatial resolution. Lowering of spatial resolution is further prevented if the substrate is thinned.
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