Invention Application
US20040112937A1 Microstructure component 失效
微结构部件

  • Patent Title: Microstructure component
  • Patent Title (中): 微结构部件
  • Application No.: US10416140
    Application Date: 2003-10-08
  • Publication No.: US20040112937A1
    Publication Date: 2004-06-17
  • Inventor: Franz Laermer
  • Priority: DE10055081.9 20001107
  • Main IPC: B23K001/00
  • IPC: B23K001/00
Microstructure component
Abstract:
A microstructure component is proposed, in particular an encapsulated micromechanical sensor element, at least one microstructure (18), especially patterned out from a silicon layer (14), being encapsulated by a glass element (51). It is further provided that at least the region of the glass element (51) covering the microstructure (18) is furnished with an electrically conductive coating (50) on its side facing the microstructure (18).
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