Invention Application
- Patent Title: Microstructure component
- Patent Title (中): 微结构部件
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Application No.: US10416140Application Date: 2003-10-08
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Publication No.: US20040112937A1Publication Date: 2004-06-17
- Inventor: Franz Laermer
- Priority: DE10055081.9 20001107
- Main IPC: B23K001/00
- IPC: B23K001/00

Abstract:
A microstructure component is proposed, in particular an encapsulated micromechanical sensor element, at least one microstructure (18), especially patterned out from a silicon layer (14), being encapsulated by a glass element (51). It is further provided that at least the region of the glass element (51) covering the microstructure (18) is furnished with an electrically conductive coating (50) on its side facing the microstructure (18).
Public/Granted literature
- US08164174B2 Microstructure component Public/Granted day:2012-04-24
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